Laser Produced Plasma Light Sources for EUV Lithography

2010 ◽  
Author(s):  
Bruno La Fontaine
Keyword(s):  
Light Sources ◽  
Euv Lithography ◽  
Laser Produced Plasma

Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography

2012 ◽  
Author(s):  
Junichi Fujimoto ◽  
Tsukasa Hori ◽  
Tatsuya Yanagida ◽  
Takeshi Ohta ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography

2004 ◽  
Author(s):  
Takashi Suganuma ◽  
Tamotsu Abe ◽  
Hiroshi Komori ◽  
Yuichi Takabayashi ◽  
Akira Endo
Keyword(s):  
Light Source ◽  
Liquid Xenon ◽  
Euv Lithography ◽  
Laser Produced Plasma

Laser-produced-plasma light source for EUV lithography

2005 ◽  
Author(s):  
Georg Soumagne ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
Hiroshi Someya ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Metrology of laser-produced plasma light source for EUV lithography

2005 ◽  
Author(s):  
N. R. Boewering ◽  
J. R. Hoffman ◽  
O. V. Khodykin ◽  
C. L. Rettig ◽  
B. A. M. Hansson ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Laser-produced plasma source development for EUV lithography

2009 ◽  
Author(s):  
H. Komori ◽  
T. Abe ◽  
A. Sumitani ◽  
Y. Watanabe ◽  
T. Ishihara ◽  
...  
Keyword(s):  
Plasma Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

nano Online ◽  
2018 ◽  
Author(s):  
Igor Fomenkov ◽  
David Brandt ◽  
Alex Ershov ◽  
Alexander Schafgans ◽  
Yezheng Tao ◽  
...  
Keyword(s):  
High Volume ◽  
Light Sources ◽  
Power Scaling ◽  
Euv Lithography ◽  
Lithography Technology
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