Laser direct-write process for fabrication of VLSI gate-array interconnects

Laser Direct Write Technologies as Tools for Gate-Array Development*

MRS Proceedings ◽

10.1557/proc-29-55 ◽

1983 ◽

Vol 29 ◽

Cited By ~ 1

Author(s):

D. J. Silversmith ◽

D. J. Ehrlich ◽

J. Y. Tsao ◽

R. W. Mountain ◽

J. H. C. Sedlacek

Keyword(s):

Al Alloy ◽

Direct Write ◽

Standard Cell ◽

Metal Gate ◽

Circuit Performance ◽

Single Level ◽

Gate Array ◽

Laser Cvd ◽

Wet Etch ◽

Laser Direct Write

ABSTRACTUsing CMOS, poly-Si gate, single-level metal, gate-array chips, techniques have been developed to reconfigure the interconnect metallization on individual circuits without degradation of device or circuit performance. These techniques involve a laser-assisted capillary wet-etch process for highly selective removal of Al-alloy interconnects and laser CVD of doped poly-Si links. This technique may be useful for prototyping, testing and optimization of gate-array and standard-cell designs and layouts.

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Laser direct-write using air-drying conductive paste

Pacific International Conference on Applications of Lasers and Optics ◽

10.2351/1.5057118 ◽

2008 ◽

Author(s):

David A. Willis ◽

Daniel M. Perkins ◽

Jason P. Stegall

Keyword(s):

Direct Write ◽

Air Drying ◽

Laser Direct Write

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Redistribution of pads on a singulated IC die using laser direct-write ablation

IEEE Transactions on Components and Packaging Technologies ◽

10.1109/tcapt.2006.870393 ◽

2006 ◽

Vol 29 (1) ◽

pp. 184-189

Author(s):

Chengping Zhang ◽

R. Bartholomew ◽

P.C. Karulkar

Keyword(s):

Direct Write ◽

Laser Direct Write

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Picoliter-Scale Protein Microarrays by Laser Direct Write

Biotechnology Progress ◽

10.1021/bp015516g ◽

2002 ◽

Vol 18 (5) ◽

pp. 1126-1129 ◽

Cited By ~ 70

Author(s):

B.R. Ringeisen ◽

P.K. Wu ◽

H. Kim ◽

A. Pique ◽

R.Y.C. Auyeung ◽

...

Keyword(s):

Protein Microarrays ◽

Direct Write ◽

Laser Direct Write

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Rapid Prototyping of Embedded Microelectronics by Laser Direct-Write

Rapid Prototyping Technology - Principles and Functional Requirements ◽

10.5772/24072 ◽

2011 ◽

Author(s):

Alberto Pique

Keyword(s):

Rapid Prototyping ◽

Direct Write ◽

Laser Direct Write

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Rapid prototyping of micropower sources by laser direct-write

Applied Physics A ◽

10.1007/s00339-004-2586-1 ◽

2004 ◽

Vol 79 (4-6) ◽

pp. 783-786 ◽

Cited By ~ 31

Author(s):

A. Piqué ◽

C.B. Arnold ◽

H. Kim ◽

M. Ollinger ◽

T.E. Sutto

Keyword(s):

Rapid Prototyping ◽

Direct Write ◽

Laser Direct Write

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Fabrication of Hybrid Cell-Microbead Constructs Using Laser Direct-Write of Alginate Microbeads and Adherent Breast Cancer Cells

Volume 1A: Abdominal Aortic Aneurysms; Active and Reactive Soft Matter; Atherosclerosis; BioFluid Mechanics; Education; Biotransport Phenomena; Bone, Joint and Spine Mechanics; Brain Injury; Cardiac Mechanics; Cardiovascular Devices, Fluids and Imaging; Cartilage and Disc Mechanics; Cell and Tissue Engineering; Cerebral Aneurysms; Computational Biofluid Dynamics; Device Design, Human Dynamics, and Rehabilitation; Drug Delivery and Disease Treatment; Engineered Cellular Environments ◽

10.1115/sbc2013-14521 ◽

2013 ◽

Author(s):

Andrew D. Dias ◽

David M. Kingsley ◽

Douglas B. Chrisey ◽

David T. Corr

Keyword(s):

Drug Delivery ◽

Mammalian Cells ◽

Hybrid Cell ◽

High Surface ◽

High Surface Area ◽

Volume Ratio ◽

Direct Write ◽

Cellular Interactions ◽

Paracrine Signaling ◽

Laser Direct Write

Microbeads are becoming popular tools in tissue engineering as 3D microstructure hydrogels. The gel nature of microbeads enables them to sequester soluble factors and mammalian cells, and their high surface area-to-volume ratio allows diffusion between the bead and the environment [1,2]. Microbeads are thus good systems for drug delivery and can serve as 3D microenvironments for cells. To fully maximize their potential as delivery systems and microenvironments, it is highly desirable to create spatially-precise hybrid cultures of microbeads and mammalian cells. Precise placement of microbeads in proximity to patterned cells will allow the study of spatial cellular interactions, paracrine signaling, and drug delivery.

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Ultrafast Laser Processing for Lab-on-a-Chip Device Manufacture

MRS Proceedings ◽

10.1557/proc-850-mm1.3 ◽

2004 ◽

Vol 850 ◽

Author(s):

Koji Sugioka ◽

Ya Cheng ◽

Katsumi Midorikawa

Keyword(s):

Heat Treatment ◽

Laser Processing ◽

Lab On A Chip ◽

Ultrafast Laser ◽

Wet Etching ◽

Direct Write ◽

Electric Control ◽

Fs Laser ◽

Laser Direct Write ◽

Hollow Microstructures

ABSTRACT3D microstructuring of photosensitive glass is demonstrated by femtosecond (fs) laser for lab-on-a-chip manufacture. True 3D hollow microstructures embedded in the glass are fabricated by the fs laser direct write followed by heat treatment and successive wet etching. A variety of microcomponents for a lab-on-a-chip device like a microfluidics, a microvalve, a microoptics, a microlaser, etc. are fabricated by using this technique. The fs laser direct write process is also applied for selective metallization of internal walls of the hollow microstructures embedded in the glass for electric control of movement of the micromechanical components in the lab-on-a-chip device.

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