High-efficiency Fresnel zone plate for microoptics by deep UV lithography
Keyword(s):
2018 ◽
Vol 86
◽
pp. 29-39
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Keyword(s):
2017 ◽
Vol 28
(5)
◽
pp. 055209
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Keyword(s):
1986 ◽
Vol 25
(Part 1, No. 2)
◽
pp. 223-227
◽
Keyword(s):
2007 ◽
Vol 25
(6)
◽
pp. 1771
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