Freeform surface off-axis illumination design with the Monge–Ampère equation method in optical lithography

2014 ◽  
Vol 53 (31) ◽  
pp. 7296 ◽  
Author(s):  
Yaqin Zhang ◽  
Rengmao Wu ◽  
Zhenrong Zheng
Keyword(s):  
Optical Lithography ◽  
Equation Method ◽  
Freeform Surface ◽  
Illumination Design ◽  
Monge Ampere

scholarly journals Initial design with L^2 Monge-Kantorovich theory for the Monge–Ampère equation method in freeform surface illumination design

2014 ◽  
Vol 22 (13) ◽  
pp. 16161 ◽  
Author(s):  
Rengmao Wu ◽  
Yaqin Zhang ◽  
Mohamed M. Sulman ◽  
Zhenrong Zheng ◽  
Pablo Benítez ◽  
...  
Keyword(s):  
Equation Method ◽  
Freeform Surface ◽  
Illumination Design ◽  
Initial Design ◽  
Monge Ampere

Designing two freeform surfaces with Monge–Ampère equation method for point-like sources

2018 ◽  
Author(s):  
Rengmao Wu ◽  
Zhenrong Zheng ◽  
Shengqian Chang ◽  
Zhanghao Ding
Keyword(s):  
Equation Method ◽  
Freeform Surfaces ◽  
Monge Ampere

scholarly journals Influence of the characteristics of a light source and target on the Monge–Ampére equation method in freeform optics design

2014 ◽  
Vol 39 (3) ◽  
pp. 634 ◽  
Author(s):  
Rengmao Wu ◽  
Pablo Benítez ◽  
Yaqin Zhang ◽  
Juan C. Miñano
Keyword(s):  
Light Source ◽  
Equation Method ◽  
Freeform Optics ◽  
Monge Ampere ◽  
Optics Design

Freeform illumination design: a nonlinear boundary problem for the elliptic Monge–Ampére equation

2013 ◽  
Vol 38 (2) ◽  
pp. 229 ◽  
Author(s):  
Rengmao Wu ◽  
Liang Xu ◽  
Peng Liu ◽  
Yaqin Zhang ◽  
Zhenrong Zheng ◽  
...  
Keyword(s):  
Boundary Problem ◽  
Nonlinear Boundary ◽  
Illumination Design ◽  
Nonlinear Boundary Problem ◽  
Monge Ampere

Simultaneous control on the intensity and phase profile of laser beam with Monge-Ampère equation method

2014 ◽  
Author(s):  
Yaqin Zhang ◽  
Rengmao Wu ◽  
Zhenrong Zheng ◽  
Haifeng Li ◽  
Xu Liu
Keyword(s):  
Laser Beam ◽  
Equation Method ◽  
Simultaneous Control ◽  
Phase Profile ◽  
Monge Ampere

Double freeform surfaces design for laser beam shaping with Monge–Ampère equation method

2014 ◽  
Vol 331 ◽  
pp. 297-305 ◽  
Author(s):  
Yaqin Zhang ◽  
Rengmao Wu ◽  
Peng Liu ◽  
Zhenrong Zheng ◽  
Haifeng Li ◽  
...  
Keyword(s):  
Laser Beam ◽  
Beam Shaping ◽  
Equation Method ◽  
Laser Beam Shaping ◽  
Freeform Surfaces ◽  
Monge Ampere
Sign in / Sign up

Export Citation Format

Share Document