Simplified dual-channel two-wavelength interferometer using a polarized cube beam splitter

2021 ◽  
Author(s):  
Shan Mingguang ◽  
Zhong Zhi ◽  
lei liu
Keyword(s):  
Beam Splitter ◽  
Dual Channel ◽  
Cube Beam Splitter

Development of a Six-Degree-of-Freedom Geometric Error Measurement System for a Meso-Scale Machine Tool

2005 ◽  
Vol 127 (4) ◽  
pp. 857-865 ◽  
Author(s):  
Sang Won Lee ◽  
Rhett Mayor ◽  
Jun Ni
Keyword(s):  
Beam Splitter ◽  
Geometric Error ◽  
Laser Beams ◽  
Error Measurement ◽  
Error Components ◽  
Laser Module ◽  
Cube Beam Splitter ◽  
Six Degree Of Freedom ◽  
Geometric Error Measurement ◽  
Meso Scale

This paper presents the development of a six-degree-of-freedom (DOF) geometric error measurement (6GEM) system that can be applied to the simultaneous measurement of six geometric error components of the moving axes of a meso-scale machine tool (mMT). The system consists of a laser module constructed by a cube beam splitter and a pigtailed laser diode, three two-dimensional position sensitive detectors (PSDs), and an additional cube beam splitter. The laser module moving with the positioning system of the developed mMT testbed generates two perpendicular laser beams, one of which is further divided into two laser beams at the second cube beam splitter. These three laser beams are detected by the three PSDs, and the full pose of the laser module is then calculated simultaneously by forward and inverse kinematic computations. The calculated full pose of the laser module is translated into six-DOF geometric errors of the mMT testbed. A series of experiments are performed to demonstrate the effectiveness and accuracy of the proposed 6GEM system. The experimental results show that the measurement accuracy of the 6GEM system was better than ±0.6μm for translational error components and ±0.6arcsec for angular error components.

Dual-plane slightly off-axis digital holography based on a single cube beam splitter

2018 ◽  
Vol 57 (10) ◽  
pp. 2727 ◽  
Author(s):  
Miguel León-Rodríguez ◽  
Juan A. Rayas ◽  
Raúl R. Cordero ◽  
Amalia Martínez-García ◽  
Adrián Martínez-Gonzalez ◽  
...  
Keyword(s):  
Digital Holography ◽  
Beam Splitter ◽  
Dual Plane ◽  
Cube Beam Splitter

Simple phase shifting by polarizer rotations in a cube beam-splitter interferometer

2019 ◽  
Vol 58 (4) ◽  
pp. 1005 ◽  
Author(s):  
Uriel Rivera-Ortega ◽  
Dorilian Lopez-Mago
Keyword(s):  
Beam Splitter ◽  
Phase Shifting ◽  
Simple Phase ◽  
Cube Beam Splitter

scholarly journals Correction to: Dynamic Mach–Zehnder interferometer based on a Michelson configuration and a cube beam splitter system

2019 ◽  
Vol 26 (6) ◽  
pp. 719-719
Author(s):  
A. Montes Pérez ◽  
G. Rodríguez-Zurita ◽  
V. H. Flores-Muñoz ◽  
G. Parra-Escamilla ◽  
D. I. Serrano-García ◽  
...  
Keyword(s):  
Beam Splitter ◽  
Zehnder Interferometer ◽  
Cube Beam Splitter ◽  
Mach Zehnder Interferometer

Characterization and inspection of microlens array by single cube beam splitter microscopy

2011 ◽  
Vol 50 (6) ◽  
pp. 886 ◽  
Author(s):  
Weijuan Qu ◽  
Oi Choo Chee ◽  
Yingjie Yu ◽  
Anand Asundi
Keyword(s):  
Beam Splitter ◽  
Microlens Array ◽  
Cube Beam Splitter

scholarly journals Dynamic Mach–Zehnder interferometer based on a Michelson configuration and a cube beam splitter system

2019 ◽  
Vol 26 (2) ◽  
pp. 231-240 ◽  
Author(s):  
A. Montes Pérez ◽  
G. Rodríguez-Zurita ◽  
V. H. Flores-Muñoz ◽  
G. Parra-Escamilla ◽  
D. I. Serrano-García ◽  
...  
Keyword(s):  
Beam Splitter ◽  
Zehnder Interferometer ◽  
Cube Beam Splitter ◽  
Mach Zehnder Interferometer

Interferometric Imaging Spectropolarimeter Using Dual-Channel Lateral Shearing Beam Splitter

2017 ◽  
Vol 37 (10) ◽  
pp. 1011002
Author(s):  
刘成淼 Liu Chengmiao ◽  
李建欣 Li Jianxin ◽  
朱日宏 Zhu Rihong ◽  
崔向群 Cui Xiangqun
Keyword(s):  
Beam Splitter ◽  
Interferometric Imaging ◽  
Dual Channel ◽  
Lateral Shearing
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