Theoretical analysis and measurement of the temperature dependence of a micromachined Fabry–Perot pressure sensor

2005 ◽  
Vol 44 (2) ◽  
pp. 249 ◽  
Author(s):  
Dagang Guo ◽  
Weijun Wang ◽  
Rongming Lin
2000 ◽  
Author(s):  
Zhiquan Li ◽  
Lina Fan ◽  
Xifu Qiang
Keyword(s):  

2012 ◽  
Author(s):  
Jun Ma ◽  
Wei Jin ◽  
Hoi Lut Ho
Keyword(s):  

2016 ◽  
Vol 8 (5) ◽  
pp. 1-8 ◽  
Author(s):  
Jia Shi ◽  
Yuye Wang ◽  
Degang Xu ◽  
Yixin He ◽  
Junfeng Jiang ◽  
...  

1971 ◽  
Vol 61 (4) ◽  
pp. 937-955
Author(s):  
Stanley Smookler ◽  
John V. Kline

abstract A capacitive-strainmeter transducer is calibrated using a variable-spacing, Fabry-Perot interferometer. Optical flats are mounted on a spring parallelogram. Thermal expansion of a steel tube deforms the parallelogram, smoothly displacing one of the optical flats. This modulates the intensity of the 5016 àline, observed at the central zone of the interference pattern, and thus produces sharp peaks on a pen recorder. A theoretical analysis of the peak width, based on the work of Chabbal (1958), agrees with that recorded by the interferometer. This calibration permits earth-strain measurements to an accuracy of 1 per cent.


2017 ◽  
Vol 17 (14) ◽  
pp. 4388-4393 ◽  
Author(s):  
Wenge Zhu ◽  
Baokai Cheng ◽  
Yurong Li ◽  
Runar Nygaard ◽  
Hai Xiao

2017 ◽  
Vol 25 (25) ◽  
pp. 31937 ◽  
Author(s):  
Xue Wang ◽  
Shuang Wang ◽  
Junfeng Jiang ◽  
Kun Liu ◽  
Xuezhi Zhang ◽  
...  

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