Theoretical analysis and measurement of the temperature dependence of a micromachined Fabry–Perot pressure sensor
2000 ◽
2010 ◽
Keyword(s):
1971 ◽
Vol 61
(4)
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pp. 937-955
Keyword(s):
2017 ◽
Vol 17
(14)
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pp. 4388-4393
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Keyword(s):