Single sequence phase shifting spectrally resolvedinterferometry for in-line thin film thicknessmeasurement using spectral reflectance and phase

2021 ◽  
Author(s):  
Yeongchan Cho ◽  
Seung Woo Lee ◽  
Sin Yong Lee ◽  
GARAM CHOI ◽  
Heui Jae Pahk
Keyword(s):  
Thin Film ◽  
Spectral Reflectance ◽  
Phase Shifting ◽  
Single Sequence

Phase shifting thin film multilayers for Michelson interferometers

1989 ◽  
Vol 28 (14) ◽  
pp. 2854 ◽  
Author(s):  
Susan H. C. Piotrowski McCall ◽  
J. A. Dobrowolski ◽  
Gordon G. Shepherd
Keyword(s):  
Thin Film ◽  
Phase Shifting

Appling of New Optical Measurement and Theory in Mechanical Properties of Thin Film

2011 ◽  
Vol 121-126 ◽  
pp. 4295-4299
Author(s):  
Hao MA Yun ◽  
Lu Ping Chao ◽  
J. S Hsu
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Thermal Stresses ◽  
Optical Measurement ◽  
Phase Shifting ◽  
Deposition Condition ◽  
Full Field ◽  
Evaporation Technique ◽  
Film Substrate

The thesis aims to characterize the mechanical properties and stresses for thin films deposited on the circular substrates. First, the thin films with the same deposition condition were successively deposited on the distinct substrates using the evaporation technique. The phase-shifting Twyman-Green interferometer (PSTGI) was then employed to measure the warpage of the film-substrate structures and therefore the intrinsic stresses and thermal stresses can be calculated from the well-known Stoney’s formula. The coefficients of thermal expansion (CTE) and Young’s modulus of thin films were also obtained from the Stoney’s theory. Furthermore, the merit of full-field character of optical interferometry was used to propose a novel methodology using the Chen and Ou’s theory to improve the accuracy and to reduce the experiment procedures in the traditional measurement of the aforementioned mechanical properties. Finally, the measured results corresponding to the traditional and proposed methods were respectively substituted into their adopted theories to compare their difference. The results reveal that the accuracy of proposed methodology is considerably improved and the experimental procedures are reduced to those of the traditional methods.

Thin Film Reflectance Model for Trap Detector

2021 ◽  
Author(s):  
Brian H.T. Lee ◽  
◽  
Brenda H.S. Lam ◽  
C.M. Tsui
Keyword(s):  
Thin Film ◽  
Spectral Reflectance ◽  
Internal Quantum Efficiency ◽  
Oxide Thickness ◽  
Thickness Variation ◽  
Spectral Responsivity ◽  
Silicon Photodiode ◽  
Measurement Models ◽  
Trap Detector ◽  
Reflectance Model

The physical model of the spectral responsivity of trap detector consists of multiple parameters such as the internal quantum efficiency and the spectral reflectance. In some measurement models, the spectral reflectance of the trap detector is approximated by fitting a wavelength dependence equation which does not consider the effect of the oxide thickness of the silicon photodiode. To analyse the uncertainty due to the oxide thickness variation, a thin film reflectance model is set up in the Standards and Calibration Laboratory (SCL) for the evaluation of the spectral reflectance of the trap detectors. The model is based on the Fresnel coefficients of a 3-layer thin film structure which consists of air and a thin film oxide layer on a silicon substrate. The reflectance model was implemented as user-defined functions to calculate the spectral reflectance at different oxide thickness. It was also integrated with the SCL’s MCM program to evaluate the uncertainty of the spectral responsivity of trap detectors.

B23-O-12Visualization of potential map in a thin-film solar cell by high sensitivity phase-shifting electron holography

Microscopy ◽  
2015 ◽  
Vol 64 (suppl 1) ◽  
pp. i58.2-i58
Author(s):  
Kazuo Yamamoto ◽  
Takuya Matsui ◽  
Hajime Shibata ◽  
Ryuji Yoshida ◽  
Takeharu Kato ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cell ◽  
Thin Film Solar Cell ◽  
High Sensitivity ◽  
Phase Shifting ◽  
Electron Holography ◽  
Potential Map
Sign in / Sign up

Export Citation Format

Share Document