scholarly journals Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices

2004 ◽  
Vol 43 (23) ◽  
pp. 4584 ◽  
Author(s):  
Malalahalli S. Giridhar ◽  
Kibyung Seong ◽  
Axel Schülzgen ◽  
Pramod Khulbe ◽  
Nasser Peyghambarian ◽  
...  
Keyword(s):  
Pulsed Laser ◽  
Microfluidic Devices ◽  
Laser Micromachining ◽  
Glass Substrates ◽  
Femtosecond Pulsed Laser

Fabrication of diffraction grating in polydimethylsiloxane using femtosecond-pulsed laser micromachining

2010 ◽  
Vol 87 (5-8) ◽  
pp. 1344-1347 ◽  
Author(s):  
Tien-Li Chang ◽  
Shao-Wei Luo ◽  
Han-Ping Yang ◽  
Chi-Hung Lee
Keyword(s):  
Diffraction Grating ◽  
Pulsed Laser ◽  
Laser Micromachining ◽  
Femtosecond Pulsed Laser

scholarly journals Surface damage and threshold determination of Ge–As–Se glasses in femtosecond pulsed laser micromachining

2020 ◽  
Vol 104 (3) ◽  
pp. 1614-1614
Author(s):  
Wenqiang Ma ◽  
Leilei Wang ◽  
Peiqing Zhang ◽  
Yinsheng Xu ◽  
Liang Zhu ◽  
...  
Keyword(s):  
Pulsed Laser ◽  
Surface Damage ◽  
Laser Micromachining ◽  
Threshold Determination ◽  
Femtosecond Pulsed Laser

scholarly journals Maskless, rapid manufacturing of glass microfluidic devices using a picosecond pulsed laser

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Krystian L. Wlodarczyk ◽  
Duncan P. Hand ◽  
M. Mercedes Maroto-Valer
Keyword(s):  
Microfluidic Device ◽  
Cross Sections ◽  
Laser System ◽  
Pulsed Laser ◽  
Microfluidic Devices ◽  
Water Remediation ◽  
Anodic Bonding ◽  
Glass Substrates ◽  
3D Objects ◽  
Recovery Processes

AbstractConventional manufacturing of glass microfluidic devices is a complex, multi-step process that involves a combination of different fabrication techniques, typically photolithography, chemical/dry etching and thermal/anodic bonding. As a result, the process is time-consuming and expensive, in particular when developing microfluidic prototypes or even manufacturing them in low quantity. This report describes a fabrication technique in which a picosecond pulsed laser system is the only tool required to manufacture a microfluidic device from transparent glass substrates. The laser system is used for the generation of microfluidic patterns directly on glass, the drilling of inlet/outlet ports in glass covers, and the bonding of two glass plates together in order to enclose the laser-generated patterns from the top. This method enables the manufacturing of a fully-functional microfluidic device in a few hours, without using any projection masks, dangerous chemicals, and additional expensive tools, e.g., a mask writer or bonding machine. The method allows the fabrication of various types of microfluidic devices, e.g., Hele-Shaw cells and microfluidics comprising complex patterns resembling up-scaled cross-sections of realistic rock samples, suitable for the investigation of CO2 storage, water remediation and hydrocarbon recovery processes. The method also provides a route for embedding small 3D objects inside these devices.

High-energy femtosecond pulsed laser micromachining of thin film deposited silicon in self-focused air medium

2002 ◽  
Vol 14 (4) ◽  
pp. 221-229 ◽  
Author(s):  
Yuanyuan Dong ◽  
Pal Molian ◽  
Christian Zorman ◽  
Mehran Mehregany
Keyword(s):  
Thin Film ◽  
Pulsed Laser ◽  
Laser Micromachining ◽  
High Energy ◽  
Air Medium ◽  
Femtosecond Pulsed Laser

Surface damage and threshold determination of Ge–As–Se glasses in femtosecond pulsed laser micromachining

2019 ◽  
Vol 103 (1) ◽  
pp. 94-102 ◽  
Author(s):  
Wenqiang Ma ◽  
Leilei Wang ◽  
Peiqing Zhang ◽  
Yinsheng Xu ◽  
Liang Zhu ◽  
...  
Keyword(s):  
Pulsed Laser ◽  
Surface Damage ◽  
Laser Micromachining ◽  
Threshold Determination ◽  
Femtosecond Pulsed Laser

Two-photon-excited fluorescence from silicate glass containing tantalum ions pumped by a near-infrared femtosecond pulsed laser

2006 ◽  
Vol 31 (19) ◽  
pp. 2867 ◽  
Author(s):  
Xiangeng Meng ◽  
Katsuhisa Tanaka ◽  
Shunsuke Murai ◽  
Koji Fujita ◽  
Kiyotaka Miura ◽  
...  
Keyword(s):  
Silicate Glass ◽  
Near Infrared ◽  
Pulsed Laser ◽  
Two Photon ◽  
Femtosecond Pulsed Laser
Sign in / Sign up

Export Citation Format

Share Document