scholarly journals Diffractive optical elements based on Fourier optical techniques: a new class of optics for extreme ultraviolet and soft x-ray wavelengths

2002 ◽  
Vol 41 (35) ◽  
pp. 7384 ◽  
Author(s):  
Chang Chang ◽  
Patrick Naulleau ◽  
Erik Anderson ◽  
Kristine Rosfjord ◽  
David Attwood
2019 ◽  
Vol 26 (1) ◽  
pp. 18-27 ◽  
Author(s):  
Mykola Biednov ◽  
Günter Brenner ◽  
Benjamin Dicke ◽  
Holger Weigelt ◽  
Barbara Keitel ◽  
...  

An extreme-ultraviolet (XUV) double-stage Raman spectrometer is permanently installed as an experimental end-station at the PG1 beamline of the soft X-ray/XUV free-electron laser in Hamburg, FLASH. The monochromator stages are designed according to the Czerny–Turner optical scheme, adapted for the XUV photon energy range, with optical elements installed at grazing-incidence angles. Such an optical scheme along with the usage of off-axis parabolic mirrors for light collimation and focusing allows for aberration-free spectral imaging on the optical axis. Combining the two monochromators in additive dispersion mode allows for reaching high resolution and superior stray light rejection, but puts high demands on the quality of the optical alignment. In order to align the instrument with the highest precision and to quantitatively characterize the instrument performance and thus the quality of the alignment, optical laser interferometry, Hartmann–Shack wavefront-sensing measurements as well as off-line soft X-ray measurements and extensive optical simulations were conducted. In this paper the concept of the alignment scheme and the procedure of the internal optical alignment are presented. Furthermore, results on the imaging quality and resolution of the first monochromator stage are shown.


2003 ◽  
Vol 11 (19) ◽  
pp. 2278 ◽  
Author(s):  
Enzo Di Fabrizio ◽  
Dan Cojoc ◽  
Stefano Cabrini ◽  
Burkhard Kaulich ◽  
Jean Susini ◽  
...  

SPIE Newsroom ◽  
2014 ◽  
Author(s):  
Changqing Xie ◽  
Xiaoli Zhu ◽  
Hailiang Li ◽  
Jiebin Niu ◽  
Nan Gao ◽  
...  

2005 ◽  
Vol 144-147 ◽  
pp. 957-961 ◽  
Author(s):  
Enzo Di Fabrizio ◽  
Dan Cojoc ◽  
Stefano Cabrini ◽  
Matteo Altissimo ◽  
Burkhard Kaulich ◽  
...  

1993 ◽  
Author(s):  
Yu A. Agafonov ◽  
Sergey V. Babin ◽  
Alexei I. Erko ◽  
A. A. Shestakov ◽  
Igor A. Schelokov

2018 ◽  
Vol 10 (4) ◽  
pp. 115 ◽  
Author(s):  
Mateusz Surma ◽  
Izabela Ducin ◽  
Maciej Sypek ◽  
Przemyslaw Zagrajek ◽  
Agnieszka Siemion

Diffractive optical elements (DOEs) are strictly related to the design wavelength due to the fact that they must introduce particular phase delay of the wavefront propagating through the structure. Mostly the attenuation of the material is not taken into account. In this article we propose to optimize thickness of the DOE by reducing introduced phase retardation but also attenuation. The efficiency of DOEs is determined by the method of coding phase distribution and can be easily measured by using diffraction orders of corresponding diffraction grating. Here, we analyze binary phase diffraction gratings with assumed attenuation. Full Text: PDF ReferencesJ.-L. Coutaz, Optoélectronique térahertz (Les Ulis CEDEX A, France, EDP Sciences 2012). DirectLink D. Headland, Y. Monnai, D. Abbott, C. Fumeaux,and W. Withayachumnankul, "Tutorial: Terahertz beamforming, from concepts to realizations", APL Photonics 3, 5 (2018). CrossRef S. F. Busch, M. Weidenbach, M. Frey, F. Schäfer, T. Probst, nd M. Koch, "A 3D-Printable Polymer-Metal Soft-Magnetic Functional Composite—Development and Characterization", Journal of Infrared, Millimeter, and Terahertz Waves 35, 12 (2014) CrossRef A. Siemion, P. Kostrowiecki-Lopata, A. Pindur, P. Zagrajek, M. Sypek, "Paper on Designing Costless THz Paper Optics", Advances in Materials Science and Engineering 2016, 9615698 (2016). CrossRef A. Siemion, A. Siemion, M. Makowski, J. Suszek, J. Bomba, A. Czerwinski, F. Garet, J.-L. Coutaz, and M. Sypek, "Diffractive paper lens for terahertz optics", Opt. Lett. 37, 4320–4322 (2012). CrossRef J.-L. Coutaz, F. Garet, E. Bonnet, A. V. Tishchenko, O. Parriaux, and M. Nazarov, "Grating Diffraction Effects in the THz Domain", Acta Phys. Pol. A 107, 26-37 (2005). CrossRef M. S. Heimbeck, P. J. Reardon, J. Callahan, and H. O. Everitt, "Transmissive quasi-optical Ronchi phase grating for terahertz frequencies", Opt. Lett. 35, 21 (2010). CrossRef D. Li, S. Shu, F. Li, G. Ma, Y. Dai, and H. Ma, "Anomalous transmission of terahertz wave through one-dimensional lamellar metallic grating", Opt. Commun. 284, 10-11 (2011). CrossRef X. Li, and S. F. Yu, "Diffraction Characteristics of Concentric Circular Metal Grating Operating at Terahertz Regime", IEEE Journal of Quantum Electronics 46, 6 (2010). CrossRef B. Nöhammer, C. David, J. Gobrecht, and H. P. Herzig, "Optimized staircase profiles for diffractive optical devices made from absorbing materials", Opt. Lett. 28(13), 1087-1089 (2003). CrossRef V. Deuter, M. Grochowicz, S. Brose, J. Biller, S. Danylyuk, T. Taubner, D. Grutzmacher, and L. Juschkin, "Holographic masks for computational proximity lithography with EUV radiation", International Conference on Extreme Ultraviolet Lithography 2018 10809, 108091A (2018). CrossRef J. W. Goodman, Introduction to Fourier optics (Greenwood Village, USA, Roberts & Company Publishers 2005). DirectLink W. B. Veldkamp, "Optimized staircase profiles for diffractive optical devices made from absorbing materials", Appl. Opt. 21(17), 3209-3212W (1982). CrossRef W. B. Veldkamp, and C. J. Kastner, "Beam profile shaping for laser radars that use detector arrays", Appl. Opt. 21(2), 345-356 (1982). CrossRef https://www.mcortechnologies.com/de/3d-drucker/mcor-iris/ DirectLinkM. Sypek, M. Makowski, E. Hérault, A. Siemion, A. Siemion, J. Suszek, F. Garet, and J.-L. Coutaz, "Highly efficient broadband double-sided Fresnel lens for THz range", Opt. Lett. 37, 12 (2012). CrossRef


1987 ◽  
Vol 103 ◽  
Author(s):  
Troy W. Barbee

ABSTRACTMultilayers are man-made microstructures engineered to vary in depth that are now of sufficient quality to be used as x-ray, soft x-ray and extreme ultraviolet optics. Gratings are in-plane man-made microstructures which have been used as optic elements for most of this century. Joining of these two optical elements to form combined microstructure optics has the potential for greatly enhancing both the resolution and the throughput attainable in these spectral ranges. Experimental results for multilayer gratings are presented and discussed. It will be demonstrated that multilayer diffraction gratings act as x-ray prisms and are high efficiency dispersion elements.


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