Extreme-ultraviolet calibration of thin-film Zr filters for the Cosmic Hot Interstellar Plasma Spectrometer

2002 ◽  
Vol 41 (22) ◽  
pp. 4680 ◽  
Author(s):  
Richelieu Hemphill ◽  
Maria G. Pelizzo ◽  
Mark Hurwitz
Keyword(s):  
Thin Film ◽  
Extreme Ultraviolet ◽  
Interstellar Plasma ◽  
Plasma Spectrometer

scholarly journals A Search for Extreme‐Ultraviolet Emission from Comets with the Cosmic Hot Interstellar Plasma Spectrometer (CHIPS)

2006 ◽  
Vol 650 (1) ◽  
pp. 461-469 ◽  
Author(s):  
T. P. Sasseen ◽  
M. Hurwitz ◽  
C. M. Lisse ◽  
V. Kharchenko ◽  
D. Christian ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Emission ◽  
Interstellar Plasma ◽  
Plasma Spectrometer

Experiences with thin-film filter development for the extreme ultraviolet explorer

1993 ◽  
Author(s):  
John V. Vallerga ◽  
Peter W. Vedder ◽  
Oswald H. W. Siegmund
Keyword(s):  
Thin Film ◽  
Extreme Ultraviolet ◽  
Thin Film Filter

Method for repairing Mo/Si multilayer thin film phase defects in reticles for extreme ultraviolet lithography

2002 ◽  
Vol 91 (1) ◽  
pp. 81 ◽  
Author(s):  
P. B. Mirkarimi ◽  
D. G. Stearns ◽  
S. L. Baker ◽  
J. W. Elmer ◽  
D. W. Sweeney ◽  
...  
Keyword(s):  
Thin Film ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Multilayer Thin Film ◽  
Ultraviolet Lithography

scholarly journals Generation of periodic structures on SiC upon laser plasma XUV/NIR radiations

2013 ◽  
Vol 31 (3) ◽  
pp. 547-550 ◽  
Author(s):  
L. Gemini ◽  
D. Margarone ◽  
S. Trusso ◽  
L. Juha ◽  
J. Limpouch ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon Carbide ◽  
Laser Pulse ◽  
Extreme Ultraviolet ◽  
Periodic Structures ◽  
Laser Pulses ◽  
Low Density Polyethylene ◽  
Low Density ◽  
Efficient Coupling ◽  
Sic Film

AbstractSurface periodic structures are generated upon irradiation of a silicon carbide (SiC) thin film by the plasma produced by 40 fs pulses from a Ti:Sapphire laser focused onto a thick low density polyethylene (LDPE) foil facing the SiC film. Independently of the number of laser pulses applied, these structures, with average regular periodicity of 710 nm, are evident throughout all irradiated areas. We attribute their formation to the efficient coupling of the unfocused femtosecond laser pulse with the incoherent extreme ultraviolet component of the laser-generated LDPE plasma.

Optomechanical design of the cosmic hot interstellar plasma spectrometer (CHIPS)

2003 ◽  
Author(s):  
Michael Sholl ◽  
William Donakowski ◽  
Martin M. Sirk ◽  
Tobias Clauss ◽  
Michael L. Lampton ◽  
...  
Keyword(s):  
Interstellar Plasma ◽  
Plasma Spectrometer

Long-term changes in Al thin-film extreme ultraviolet filters

2021 ◽  
Vol 60 (28) ◽  
pp. 8766
Author(s):  
Jiri Schmidt ◽  
Karel Kolacek ◽  
Alexandr Frolov ◽  
Jaroslav Straus ◽  
Petr Hoffer ◽  
...  
Keyword(s):  
Thin Film ◽  
Extreme Ultraviolet ◽  
Long Term Changes ◽  
Al Thin Film
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