Window function influence on phase error in phase-shifting algorithms

1996 ◽  
Vol 35 (28) ◽  
pp. 5642 ◽  
Author(s):  
Joanna Schmit ◽  
Katherine Creath
Keyword(s):  
Phase Error ◽  
Phase Shifting ◽  
Window Function

scholarly journals Precise Measurement of the Surface Shape of Silicon Wafer by Using a New Phase-Shifting Algorithm and Wavelength-Tuning Interferometer

2020 ◽  
Vol 10 (9) ◽  
pp. 3250
Author(s):  
Fuqing Miao ◽  
Seokyoung Ahn ◽  
Yangjin Kim
Keyword(s):  
Silicon Wafer ◽  
Phase Error ◽  
Surface Profile ◽  
Phase Shifting ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Window Function ◽  
Phase Shift Error ◽  
Coupling Error ◽  
New Phase

In wavelength-tuning interferometry, the surface profile of the optical component is a key evaluation index. However, the systematic errors caused by the coupling error between the higher harmonics and phase shift error are considerable. In this research, a new 10N − 9 phase-shifting algorithm comprising a new polynomial window function and a DFT is developed. A new polynomial window function is developed based on characteristic polynomial theory. The characteristic of the new 10N − 9 algorithm is represented in the frequency domain by Fourier description. The phase error of the new algorithm is also discussed and compared with other phase-shifting algorithms. The surface profile of a silicon wafer was measured by using the 10N − 9 algorithm and a wavelength-tuning interferometer. The repeatability measurement error across 20 experiments was 2.045 nm, which indicates that the new 10N − 9 algorithm outperforms the conventional phase-shifting algorithm.

scholarly journals Fringe Phase-Shifting Field Based Fuzzy Quotient Space-Oriented Partial Differential Equations Filtering Method for Gaussian Noise-Induced Phase Error

Sensors ◽  
2019 ◽  
Vol 19 (23) ◽  
pp. 5202 ◽  
Author(s):  
Yu ◽  
Ji ◽  
Xue ◽  
Wang
Keyword(s):  
Partial Differential Equations ◽  
Differential Equations ◽  
Gaussian Noise ◽  
Quotient Space ◽  
Signal To Noise Ratio ◽  
Phase Error ◽  
Phase Shifting ◽  
Signal To Noise ◽  
Partial Differential ◽  
Filtering Method

Traditional filtering methods only focused on improving the peak signal-to-noise ratio of the single fringe pattern, which ignore the filtering effect on phase extraction. Fringe phase-shifting field based fuzzy quotient space-oriented partial differential equations filtering method is proposed to reduce the phase error caused by Gaussian noise while filtering. First, the phase error distribution that is caused by Gaussian noise is analyzed. Furthermore, by introducing the fringe phase-shifting field and the theory of fuzzy quotient space, the modified filtering direction can be adaptively obtained, which transforms the traditional single image filtering into multi-image filtering. Finally, the improved fourth-order oriented partial differential equations with fidelity item filtering method is established. Experiments demonstrated that the proposed method achieves a higher signal-to-noise ratio and lower phase error caused by noise, while also retaining more edge details.

Effect of Phase Error in Phase-Shifting Interferometer

2019 ◽  
Vol 888 ◽  
pp. 11-16 ◽  
Author(s):  
Yoshitaka Takahashi
Keyword(s):  
Phase Shift ◽  
Measurement Errors ◽  
Phase Error ◽  
Optical Path Length ◽  
High Accuracy ◽  
Optical Path ◽  
Phase Shifting ◽  
Optical Source ◽  
Phase Shifting Interferometry ◽  
Phase Shift Error

Phase-shifting interferometry is widely used because it can measure phase with high accuracy. Changing optical path length with a PZT transducer and changing frequency of the optical source with a laser diode (LD) are two common methods to apply the desired phase shift between the arms in the interferometer. In any case, however, it is not easy to apply the desired shift accurately, and if not, measurement errors occur. In order to reduce the errors, the effect of the phase shift error has been analyzed numerically especially in the case with LD.

Active phase error suppression for color phase-shifting fringe projection based on hue pre-correction

2019 ◽  
Vol 118 ◽  
pp. 102-108 ◽  
Author(s):  
Yingying Wan ◽  
Yiping Cao ◽  
Cheng Chen ◽  
Yapin Wang ◽  
Guangkai Fu ◽  
...  
Keyword(s):  
Phase Error ◽  
Active Phase ◽  
Phase Shifting ◽  
Fringe Projection ◽  
Error Suppression
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