Linearity of the Faraday-rotation-type ac magnetic-field sensor with a ferrimagnetic or ferromagnetic rotator film

1996 ◽  
Vol 35 (7) ◽  
pp. 1083 ◽  
Author(s):  
Hiroshi Mori ◽  
Yousuke Asahara
Keyword(s):  
Magnetic Field ◽  
Faraday Rotation ◽  
Magnetic Field Sensor ◽  
Ac Magnetic Field ◽  
Field Sensor

A screen printed and flexible piezoelectric-based AC magnetic field sensor

2017 ◽  
Vol 268 ◽  
pp. 1-8 ◽  
Author(s):  
Amer Abdulmahdi Chlaihawi ◽  
Sepehr Emamian ◽  
Binu Baby Narakathu ◽  
Mohammed Mohammed Ali ◽  
Dinesh Maddipatla ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Magnetic Field Sensor ◽  
Ac Magnetic Field ◽  
Field Sensor ◽  
Screen Printed

Faraday-rotation-based miniature magnetic field sensor using polarimetric heterodyning fiber grating laser

2013 ◽  
Vol 38 (5) ◽  
pp. 688 ◽  
Author(s):  
Linghao Cheng ◽  
Jianlei Han ◽  
Zhenzhen Guo ◽  
Long Jin ◽  
Bai-Ou Guan
Keyword(s):  
Magnetic Field ◽  
Faraday Rotation ◽  
Magnetic Field Sensor ◽  
Fiber Grating ◽  
Field Sensor

scholarly journals A Novel Three-Axial Magnetic-Piezoelectric MEMS AC Magnetic Field Sensor

Micromachines ◽  
2019 ◽  
Vol 10 (10) ◽  
pp. 710
Author(s):  
Po-Chen Yeh ◽  
Hao Duan ◽  
Tien-Kan Chung
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Magnetic Fields ◽  
Thick Film ◽  
Microelectromechanical Systems ◽  
Magnetic Field Sensor ◽  
Sensing Element ◽  
Ac Magnetic Field ◽  
Pzt Thin Film ◽  
Field Sensor

We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top electrode, a piezoelectric lead zirconate titanate (PZT) thin film, a Pt/Ti bottom electrode, a SiO2 insulation layer, and a moveable Si MEMS diaphragm. When the sensor is subjected to an AC magnetic field oscillating at 7.5 kHz, a magnetic force interaction between the magnetic field and Ni thick film is produced. Subsequently, the force deforms and deflects the diaphragms as well as the PZT thin film deposited on the diaphragms. The deformation and deflection produce corresponding voltage outputs due to the piezoelectric effect. By analyzing the voltage outputs through our criterion, we can obtain details of the unknown magnetic fields to which the sensor is subjected. This achieves sensing of three-axial magnetic fields. The experimental results show that the sensor is able to sense three-axial magnetic fields ranging from 1 to 20 Oe, with X-axial, Y-axial, and Z-axial sensitivities of 0.156 mVrms/Oe, 0.156 mVrms/Oe, and 0.035 mVrms/Oe, respectively, for sensing element A and 0.033 mVrms/Oe, 0.044 mVrms/Oe, and 0.130 mVrms/Oe, respectively, for sensing element B.

Sign in / Sign up

Export Citation Format

Share Document