Coherent optical characterization of magnetooptical spatial light modulators

1990 ◽  
Vol 29 (29) ◽  
pp. 4372 ◽  
Author(s):  
Nile F. Hartman ◽  
Thomas K. Gaylord
Keyword(s):  
Optical Characterization ◽  
Spatial Light Modulators ◽  
Light Modulators

Characterization of spatial light modulators for microlithography

2003 ◽  
Author(s):  
Peter Duerr ◽  
Ulrike Dauderstaedt ◽  
Detlef Kunze ◽  
Marine Auvert ◽  
Thor Bakke ◽  
...  
Keyword(s):  
Spatial Light Modulators ◽  
Light Modulators

Sagnac-interferometer-based characterization of spatial light modulators

2009 ◽  
Vol 48 (12) ◽  
pp. 2236 ◽  
Author(s):  
Jian Wei Tay ◽  
Michael A. Taylor ◽  
Warwick P. Bowen
Keyword(s):  
Spatial Light Modulators ◽  
Sagnac Interferometer ◽  
Light Modulators

Characterization of high performance integrated optically addressed spatial light modulators

1998 ◽  
Vol 15 (2) ◽  
pp. 640 ◽  
Author(s):  
S. R. Bowman ◽  
W. S. Rabinovich ◽  
G. Beadie ◽  
S. M. Kirkpatrick ◽  
D. S. Katzer ◽  
...  
Keyword(s):  
High Performance ◽  
Spatial Light Modulators ◽  
Light Modulators

Full in-situ characterization of spatial light modulators in an optical correlator. Filter adaptation to operating curves

1998 ◽  
Vol 45 (12) ◽  
pp. 2461-2472 ◽  
Author(s):  
Octavio López-Coronado ◽  
Ignacio Moreno ◽  
Juan Campos ◽  
María J. Yzuel
Keyword(s):  
Spatial Light Modulators ◽  
In Situ Characterization ◽  
Light Modulators ◽  
Optical Correlator

Characterization of Ferroelectric Thin Film PLZT(9/65/35) on R-Plane Sapphire

1990 ◽  
Vol 200 ◽  
Author(s):  
S. Krishnakumar ◽  
S.C. Esener ◽  
C. Fan ◽  
V.H. Ozguz ◽  
M.A. Title ◽  
...  
Keyword(s):  
Lattice Mismatch ◽  
Ferroelectric Thin Film ◽  
Spatial Light Modulators ◽  
Light Modulators ◽  
Large Lattice ◽  
Large Lattice Mismatch ◽  
Deposited Films ◽  
Deposition Techniques ◽  
Post Deposition

ABSTRACTThe deposition of ferroelectric PLZT on r-plane sapphire using R-F Triode Magnetron Sputtering is reported. R-plane (1102) sapphire is chosen, in spite of its large lattice mismatch to PLZT, because of its capability of integrating MOS silicon circuits with PLZT modulators. Perovskite PLZT films with the desired composition (9/65/35) are obtained using co-deposition techniques around 500°C and post deposition annealing at 650°C. The deposited films exhibit good optical and electro-optical properties. The room temperature dielectric constant of the films was 1800 at 10 Khz. The refractive index of the films was in the range 2.2–2.5. The films showed a quadratic E-O effect with R=0.6×10−16 m2/V2. The films are promising for smart Spatial Light Modulators (SLM) applications.

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