scholarly journals Development of a Silicon-Based Electron Beam Transmission Window for Use in a KrF Excimer Laser System

2003 ◽  
Vol 43 (3) ◽  
pp. 414-419
Author(s):  
C. A. Gentile ◽  
H. M. Fan ◽  
J. W. Hartfield ◽  
R. J. Hawryluk ◽  
F. Hegeler ◽  
...  
2002 ◽  
Author(s):  
C.A. Gentile ◽  
H.M. Fan ◽  
J.W. Hartfield ◽  
R.J. Hawryluk ◽  
F. Hegeler ◽  
...  

1984 ◽  
Author(s):  
Tomoo Fujioka ◽  
Minoru Obara ◽  
Fumihiko Kannari ◽  
Akira Suda ◽  
Tadashi Suzuki

2001 ◽  
Author(s):  
Yusheng Shan ◽  
Naiyan Wang ◽  
Weiyi Ma ◽  
Dawei Yang ◽  
Xiaojun Wang ◽  
...  

2002 ◽  
Vol 20 (1) ◽  
pp. 123-127 ◽  
Author(s):  
YUSHENG SHAN ◽  
NAIYAN WANG ◽  
JINGLONG MA ◽  
WEIYI MA ◽  
DAWEI YANG ◽  
...  

A six-beam multiplexing master-oscillator-power-amplifier (MOPA) high power KrF excimer laser system has been built at CIAE for fundamental research on laser–plasma interaction. The MOPA system consists of front-end, two-stage KrF amplifiers (preamplifier and main amplifier) pumped by two-side electron beams, an optical angular multiplexing system, a synchronization trigger system, and a controlling-data acquisition system and some diagnostic systems. The total energy of the six-beam output from main amplifier on the target is 100 J/23 ns, the divergence of one beam is 0.2 mrad, the focal spot diameter is 220 μm, and the focal intensity on the target is 1013 W/cm2.


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