Controller design and implementation of six-degree-of-freedom magnetically levitated positioning system with high precision

2008 ◽  
Vol 222 (8) ◽  
pp. 745-756 ◽  
Author(s):  
H Yu ◽  
W-J Kim
Keyword(s):  
High Precision ◽  
Controller Design ◽  
Degree Of Freedom ◽  
Positioning System ◽  
Design And Implementation ◽  
Magnetically Levitated ◽  
Six Degree Of Freedom

Controller Design and Implementation for a 6-DOF Magnetically Levitated Positioner With High-Precision

2005 ◽  
Author(s):  
Ho Yu ◽  
Won-Jong Kim
Keyword(s):  
High Precision ◽  
Digital Signal Processor ◽  
Controller Design ◽  
Low Cost ◽  
Positioning System ◽  
Vertical Force ◽  
Mass System ◽  
Single Input Single Output ◽  
Design And Implementation ◽  
Magnetically Levitated

This paper presents the controller design and implementation of a high-precision 6-degree-of-freedom (6-DOF) magnetically levitated (maglev) positioner. This high-precision positioning system consists of a novel concentrated-field magnet matrix and a triangular single-moving part that carries three 3-phase permanent-magnet linear-levitation-motor armatures. Since only a single levitated moving part, namely the platen, generates all required fine and coarse motions, this positioning system is reliable and low-cost. Three planar levitation motors based on the Lorentz-force law not only generate the vertical force to levitate the triangular platen but control the platen’s position and orientation in the horizontal plane. All 6-DOF motions are controlled by magnetic forces only. The platen is regarded a pure mass system, and the spring and damping coefficients are neglected except for the vertical directions. Single-input single-output (SISO) digital lead-lag controllers are designed and implemented on a digital signal processor (DSP). This 6-DOF fully magnetically levitated positioner has a total mass of 5.91 kg and currently exhibits a 120 mm × 120 mm travel range. This positioner is highly suitable for semiconductor-manufacturing applications such as wafer steppers. Several experimental motion profiles are presented to demonstrate the maglev stage’s capability of accurately tracking any planar and 3-D paths.

scholarly journals A fast high-precision six-degree-of-freedom relative position sensor

2016 ◽  
Author(s):  
Gary B. Hughes ◽  
Van P. Macasaet ◽  
Janelle Griswold ◽  
Claudia A. Sison ◽  
Philip Lubin ◽  
...  
Keyword(s):  
High Precision ◽  
Relative Position ◽  
Degree Of Freedom ◽  
Position Sensor ◽  
Six Degree Of Freedom

Controller Design for a Force-Reflecting Teleoperator System With Kinematically Dissimilar Master and Slave

1992 ◽  
Vol 114 (4) ◽  
pp. 641-649 ◽  
Author(s):  
J. F. Jansen ◽  
R. L. Kress ◽  
S. M. Babcock
Keyword(s):  
Controller Design ◽  
Mathematical Problem ◽  
Degree Of Freedom ◽  
Euler Angles ◽  
Euler Parameters ◽  
Liapunov Stability ◽  
Basic Properties ◽  
Control Scheme ◽  
Stiffness Control ◽  
Six Degree Of Freedom

The purpose of this paper is to develop a controller for a force-reflecting teleoperator system having kinematically dissimilar master and slave. The controller is a stiffness controller for both the master and the slave. A mathematical problem associated with representing orientations using Euler angles is described, and Euler parameters are proposed as a solution. The basic properties of Euler parameters are presented, specifically those pertaining to stiffness control. The stiffness controller for both the master and the slave is formulated using Euler parameters to represent orientation and a Liapunov stability proof is presented for the controller. The master portion of the control scheme is implemented on a six-degree-of-freedom master.

Magnetically levitated six degree of freedom rotary table

CIRP Annals ◽  
2015 ◽  
Vol 64 (1) ◽  
pp. 353-356 ◽  
Author(s):  
Xiaodong Lu ◽  
Mark Dyck ◽  
Yusuf Altintas
Keyword(s):  
Degree Of Freedom ◽  
Rotary Table ◽  
Magnetically Levitated ◽  
Six Degree Of Freedom

scholarly journals A new novel six-degree of freedom two-link manipulator using active magnetic bearing: Design, kinematics, and control

2018 ◽  
Vol 15 (6) ◽  
pp. 172988141881763 ◽  
Author(s):  
Mohamed Selmy ◽  
Mohamed Fanni ◽  
Abdelfatah M Mohamed ◽  
Tomoyuki Miyashita
Keyword(s):  
High Precision ◽  
Feedback Linearization ◽  
Magnetic Bearing ◽  
Good Choice ◽  
Degree Of Freedom ◽  
Active Magnetic Bearing ◽  
New Novel ◽  
The Stability ◽  
Six Degree Of Freedom ◽  
And Control

Due to the absence of mechanical contact, active magnetic bearing can be electrically controlled in an accuracy of a micrometer. This makes it a good choice to be used for robot manipulation in the micrometer scale, especially in environments that need to be very clean, for example, surgery or clean rooms. Moreover, it can be used in the applications that need high precision micromotion such as semiconductor wafers manipulation. Despite all these benefits, there are few studies that have investigated the application of active magnetic bearing in the robotics field in spotless environments for micromotion applications. This article proposes a new novel six-degree of freedom two-link manipulator using two contactless joints with active magnetic bearing. The key design aspects of the proposed manipulator are presented. The proposed manipulator is designed using finite element method. Each joint roll angle is controlled using a PID-based feedback linearization controller, while a state feedback controller with integral term is used for controlling the active magnetic bearing five-degree of freedom. The stability analysis of the system, under the proposed controller, is carried out. The robustness of the controllers is tested against end effector payload variations. The results demonstrate that the proposed two-link manipulator is feasible and valid for the applications in spotless environments that need high precision accuracy micromotion control. These significant findings have indicated the feasibility of implementing this proposed manipulator in practice and open the door for developing other types of robots with complete contactless joints using active magnetic bearing.

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