Introduction to Advanced Surface Modification with Gas Cluster Ion Beams

Nano-scale surface modification using gas cluster ion beams — A development history and review of the Japanese nano-technology program

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.02.081 ◽

2007 ◽

Vol 201 (19-20) ◽

pp. 8579-8587 ◽

Cited By ~ 27

Author(s):

Isao Yamada ◽

Noriaki Toyoda

Keyword(s):

Surface Modification ◽

Ion Beams ◽

Nano Technology ◽

Technology Program ◽

Development History ◽

Nano Scale ◽

Cluster Ion Beams ◽

Cluster Ion ◽

Scale Surface

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Surface modification with gas cluster ion beams

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(93)95330-8 ◽

1993 ◽

Vol 79 (1-4) ◽

pp. 223-226 ◽

Cited By ~ 99

Author(s):

I. Yamada ◽

W.L. Brown ◽

J.A. Norhby ◽

M. Sosnowski

Keyword(s):

Surface Modification ◽

Ion Beams ◽

Cluster Ion Beams ◽

Cluster Ion

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Ultra-thin surface modification with nitrogen gas cluster ion beams

10.1063/1.3548382 ◽

2011 ◽

Author(s):

Noriaki Toyoda ◽

Takafumi Mashita ◽

Isao Yamada ◽

Jiro Matsuo ◽

Masataka Kase ◽

...

Keyword(s):

Surface Modification ◽

Ion Beams ◽

Nitrogen Gas ◽

Cluster Ion Beams ◽

Cluster Ion

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Cluster size effects of gas cluster ion beams on surface modification

10.1063/1.2401497 ◽

2006 ◽

Cited By ~ 1

Author(s):

N. Toyoda ◽

I. Yamada

Keyword(s):

Surface Modification ◽

Size Effects ◽

Cluster Size ◽

Ion Beams ◽

Cluster Ion Beams ◽

Cluster Ion

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Intuitive Model of Surface Modification Induced by Cluster Ion Beams

Analytical Chemistry ◽

10.1021/acs.analchem.0c01219 ◽

2020 ◽

Vol 92 (10) ◽

pp. 7349-7353 ◽

Cited By ~ 1

Author(s):

Dawid Macia̧żek ◽

Micha Kański ◽

Zbigniew Postawa

Keyword(s):

Surface Modification ◽

Ion Beams ◽

Cluster Ion Beams ◽

Cluster Ion ◽

Intuitive Model

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Surface modification with gas cluster ion beams from fundamental characteristics to applications

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2003.11.064 ◽

2004 ◽

Vol 216 ◽

pp. 379-389 ◽

Cited By ~ 29

Author(s):

N. Toyoda ◽

J. Matsuo ◽

I. Yamada

Keyword(s):

Surface Modification ◽

Ion Beams ◽

Cluster Ion Beams ◽

Cluster Ion

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Low temperature wafer bonding with gas cluster ion beams

2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) ◽

10.23919/ltb-3d.2019.8735342 ◽

2019 ◽

Author(s):

Noriaki Toyoda ◽

Shota Ikeda

Keyword(s):

Low Temperature ◽

Wafer Bonding ◽

Ion Beams ◽

Cluster Ion Beams ◽

Cluster Ion

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Secondary ion emission from insulin film bombarded with methane and noble gas cluster ion beams

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2013.05.064 ◽

2013 ◽

Vol 315 ◽

pp. 300-303 ◽

Cited By ~ 8

Author(s):

Kousuke Moritani ◽

Masanori Kanai ◽

Kosuke Goto ◽

Issei Ihara ◽

Norio Inui ◽

...

Keyword(s):

Noble Gas ◽

Ion Beams ◽

Secondary Ion Emission ◽

Cluster Ion Beams ◽

Cluster Ion ◽

Ion Emission ◽

Secondary Ion

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Molecular depth profiling and imaging using cluster ion beams with femtosecond laser postionization

Applied Surface Science ◽

10.1016/j.apsusc.2008.05.123 ◽

2008 ◽

Vol 255 (4) ◽

pp. 831-833 ◽

Cited By ~ 19

Author(s):

D. Willingham ◽

A. Kucher ◽

N. Winograd

Keyword(s):

Femtosecond Laser ◽

Depth Profiling ◽

Ion Beams ◽

Molecular Depth Profiling ◽

Cluster Ion Beams ◽

Cluster Ion

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Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

IEEE International Interconnect Technology Conference ◽

10.1109/iitc.2014.6831879 ◽

2014 ◽

Author(s):

N. Toyoda ◽

M. Kojima ◽

R. Hinoura ◽

A. Yamaguchi ◽

K. Hara ◽

...

Keyword(s):

Acetic Acid ◽

Ion Beams ◽

Acid Vapor ◽

Cluster Ion Beams ◽

Cluster Ion ◽

Oxygen Gas

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