Electrostatic Transducers

Author(s):  
Daniel Hoffmann ◽  
Bernd Folkmer
Author(s):  
Andreas Kugi ◽  
Kurt Schlacher ◽  
Manfred Kaltenbacher ◽  
Reinhard Lerch

Abstract A strong analytical mathematical formulation of electrostatic transducers is the necessary prerequisite for the design of feedback controllers. Based on the theory of Hamiltonian systems the mathematical model of a typical electrostatic transducer configuration with a moving membrane electrode and a rigid backplate electrode is derived. It is a well known fact that an increase in the sensitivity of the transducer often brings about also an increase in the nonlinear distortion and may occur a sticking of the membrane to the backplate electrode. In this paper, we propose a concept that gives a possible solution for these undesirable effects by using a controlled voltage source for the supply voltage of the transducer. The controller is designed by shaping the potential energy of the closed loop system. The change of the capacity of the transducer due to the motion of the membrane is considered as the sensor output.


1971 ◽  
Vol 50 (1A) ◽  
pp. 127-127 ◽  
Author(s):  
J. Palin ◽  
R. R. Fay ◽  
J. A. Simmons

Ultrasonics ◽  
2002 ◽  
Vol 40 (1-8) ◽  
pp. 507-511 ◽  
Author(s):  
Paul Ingleby ◽  
William M.D. Wright

2010 ◽  
Vol 128 (4) ◽  
pp. 2339-2339
Author(s):  
Martin Harris ◽  
Daniel Sinnewald ◽  
Daniel Gavinowich ◽  
Pablo Gomez

1982 ◽  
Vol 71 (2) ◽  
pp. 528-528
Author(s):  
John P. Civitello

2010 ◽  
Vol 5 (2) ◽  
pp. 026001 ◽  
Author(s):  
S M Whiteley ◽  
D A Waters ◽  
G Hayward ◽  
S G Pierce ◽  
I Farr

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