The influence mechanism research of temperature on piezoresistive MEMS pressure sensor

Structural Health Monitoring and Integrity Management ◽

10.1201/b18510-10 ◽

2015 ◽

pp. 19-20

Keyword(s):

Pressure Sensor ◽

Influence Mechanism ◽

Mechanism Research

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Influence of Strong Light on the Performance of Piezoresistive Pressure Sensor

10.21203/rs.3.rs-1059686/v1 ◽

2021 ◽

Author(s):

Mimi Huang ◽

Libo Zhao ◽

Zutang Wu ◽

Xiangguang Han ◽

Mingzhi Yu ◽

...

Keyword(s):

Pressure Sensor ◽

Simulation Software ◽

Reflection Effect ◽

Microscopic Simulation ◽

Strong Light ◽

Suppression Effect ◽

Pressure Surface ◽

Reflective Layer ◽

Influence Mechanism ◽

Piezoresistive Pressure Sensor

Abstract It is found that the strong light in the explosion field has great interference to the piezoresistive pressure sensor, then the shock wave data obtained by the sensor is distorted badly. To study the influence mechanism of the strong light on the piezoresistive pressure sensor, a strong light experimental platform is built. The positions of the sensor and the light source are adjusted, and the outputs of the piezoresistive pressure sensor are observed. Through microscopic simulation, the influence of different light intensities on the piezoresistive pressure sensor is analyzed. In order to reduce the influence of strong light on the performance of piezoresistive pressure sensor, we propose to add a reflective layer on the pressure surface of the sensor. The light reflection effects of different film thicknesses are analyzed through film simulation software. At the same time, the reflection effect is verified through experiments. To explain the effect of the reflective layer on the suppression of strong light, a simulation model is established, and the suppression effect of the reflective layer is verified.

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Mechanism Research of Pr6O11 Addition on Wear Resistance of Alumina Ceramics

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.1104.27 ◽

2015 ◽

Vol 1104 ◽

pp. 27-30

Author(s):

Yang Wu ◽

Bo Lin Wu ◽

Si Long Bi

Keyword(s):

Wear Resistance ◽

Rare Earth ◽

Grain Boundaries ◽

Grain Growth ◽

Interface Reaction ◽

Rare Earth Ions ◽

Alumina Ceramics ◽

Composite Oxide ◽

Influence Mechanism ◽

Mechanism Research

Many literatures reported rare earth ions would segregate at grain boundaries toinhibit grain growth and improve the ceramic performance. However, the mutualinfluence between segregation and alumina grains was rarely seen in thereports. In this article, interface reaction between single crystal alumina (inorder to eliminate the influence of grain boundaries) and praseodymium oxidewas designed to further understand the influence mechanism. The resultssuggested that a composite oxide was formed at the junctions. Besides, largestresses produced between the composite oxide and alumina because of the thermalexpansion coefficient difference. This stresses would weaken grain boundariesbonding strength and reduce wear resistance.

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