Interface Circuits for Capacitive MEMS Gyroscopes

MEMS ◽  
2017 ◽  
pp. 161-181
Author(s):  
Hongzhi Sun ◽  
Huikai Xie
Keyword(s):  
Interface Circuits ◽  
Mems Gyroscopes ◽  
Capacitive Mems

Decoupled Quadrature and Force Feedback Control of Capacitive MEMS Gyroscopes*

2011 ◽  
Vol 44 (1) ◽  
pp. 13534-13539 ◽  
Author(s):  
Markus Egretzberger ◽  
Florian Mair ◽  
Andreas Kugi
Keyword(s):  
Feedback Control ◽  
Force Feedback ◽  
Mems Gyroscopes ◽  
Capacitive Mems

Design Optimization for Non-Resonant MEMS Gyroscope

2009 ◽  
Author(s):  
Wei Cui ◽  
Xiaolin Chen ◽  
Wei Xue
Keyword(s):  
Device Performance ◽  
Sense Mode ◽  
Drive Mode ◽  
Resonant Frequencies ◽  
Frequency Matching ◽  
Wide Range ◽  
Mems Gyroscopes ◽  
Capacitive Mems ◽  
Effective Design ◽  
Model Approach

Conventional capacitive MEMS gyroscopes require close matching between the resonant frequencies of drive mode and sense mode. However, the uncertainties in the microfabrication process impair the robustness of the gyroscopes and often lead to unpredictable device performance. This paper analyzes a 4 degree-of-freedom (DOF) non-resonant gyroscope which is less vulnerable to the fabrication perturbations. Unlike the conventional resonant gyroscope which has only one resonant frequency for drive and sense modes, the 4-DOF gyroscope includes two resonant frequencies for each mode. The non-resonant gyroscope design aims to reduce resonance frequency matching, namely to minimize the effect of the inevitable fabrication uncertainties as well as to increase the bandwidth with less sacrifice to the sensitivity. The device performance is analyzed and optimized by the behavior model approach in CoventorWare which significantly accelerates the simulation compared to the traditional finite element method. The optimized non-resonant gyroscope with higher fabrication tolerance as well as enhanced device performance is proven to be an effective design and can be used in a wide range of applications.

scholarly journals An Improved Phase-Robust Configuration for Vibration Amplitude-Phase Extraction for Capacitive MEMS Gyroscopes

Micromachines ◽  
2018 ◽  
Vol 9 (7) ◽  
pp. 362 ◽  
Author(s):  
Xudong Zheng ◽  
Siqi Liu ◽  
Yiyu Lin ◽  
Haibin Wu ◽  
Lai Teng ◽  
...  
Keyword(s):  
Vibration Amplitude ◽  
Microelectromechanical Systems ◽  
Phase Variation ◽  
Phase Information ◽  
Side Band ◽  
Deviation Analysis ◽  
Mems Gyroscopes ◽  
Capacitive Mems ◽  
Bias Instability ◽  
Improved Algorithm

This paper presents for the first time an improved algorithm for vibration amplitude-phase information extraction of capacitive microelectromechanical systems (MEMS) gyroscopes. Amplitude and phase information resulting from the improved algorithm is insensitive to the phase variation of an interface capacitance-voltage (CV) circuit, thus both long time drift of the gyroscope and bias instability have been improved. Experimental results show that both the phase and amplitude information extracted using this improved algorithm is insensitive to phase variation of CV circuit which is in accordance with theory. Bias instability using this improved configuration is 0.64°/h, which is improved two times more than the configuration using traditional double-side-band (DSB) demodulation configuration, and 4.3 times more than the configuration using single-side-band (SSB) demodulation, respectively. Allan deviation analysis shows that the slow varying drift term using D&S configuration is effectively reduced due to its robustness to CV phase variation compared to test results using DSB or SSB configuration.

scholarly journals On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers

Micromachines ◽  
2018 ◽  
Vol 9 (10) ◽  
pp. 488 ◽  
Author(s):  
Zhiliang Qiao ◽  
Boris Boom ◽  
Anne-Johan Annema ◽  
Remco Wiegerink ◽  
Bram Nauta
Keyword(s):  
Phase Noise ◽  
Noise Power ◽  
Interface Circuits ◽  
Promising Alternative ◽  
Readout Circuits ◽  
Lc Oscillator ◽  
Trade Offs ◽  
Mems Accelerometers ◽  
Analytical Formulas ◽  
Capacitive Mems

Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these techniques and presents a derivation of the fundamental resolution limits that are imposed on them by phase noise. Starting with an overview of basic operating principles, associated properties and challenges, the discussions then focus on the fundamental trade-offs between noise, power dissipation and signal bandwidth (BW) for the LC-oscillator-based frequency readout and for the conventional charge-based switched-capacitor (SC) readout. Closed-form analytical formulas are derived to facilitate a fair comparison between the two approaches. Benchmarking results indicate that, with the same bandwidth requirement, charge-based readout circuits are more suitable when optimizing for noise performance, while there is still some room for frequency-based techniques when optimizing for power consumption, especially when flicker phase noise can be mitigated.

Novel FIB Use for Failure Analysis of MEMS Gyroscopes

2016 ◽  
Author(s):  
Nathan Wang ◽  
Saunil Shah ◽  
Camille Garcia ◽  
Vicente Pasating ◽  
George Perreault
Keyword(s):  
Thin Films ◽  
Integrated Circuits ◽  
Failure Analysis ◽  
New Techniques ◽  
Unique Challenge ◽  
Root Cause ◽  
Large Size ◽  
Mems Gyroscopes

Abstract MEMS samples, with their relatively large size and weight, present a unique challenge to the failure analyst as they also included thin films and microstructures used in conventional integrated circuits. This paper describes how to accommodate the large MEMS structures without skimping on the microanalyses needed to get to the root cause. Investigations of tuning folk gyroscopes were used to demonstrate these new techniques.

A high-resolution area-change-based capacitive MEMS tilt sensor

2020 ◽  
Vol 313 ◽  
pp. 112191
Author(s):  
Kang Rao ◽  
Huafeng Liu ◽  
Xiaoli Wei ◽  
Wenjie Wu ◽  
Chenyuan Hu ◽  
...  
Keyword(s):  
High Resolution ◽  
Area Change ◽  
Tilt Sensor ◽  
Capacitive Mems
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