MEMS-Based Micro Hot-Plate Devices
Keyword(s):
1972 ◽
Vol 30
◽
pp. 156-157
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1985 ◽
Vol 43
◽
pp. 714-715
Keyword(s):
2020 ◽
Vol 11
(3)
◽
pp. 3377-3383
Keyword(s):
Keyword(s):
Keyword(s):
2006 ◽
Vol 3
(3)
◽
pp. 319-329