Heat Flow in Non-homogeneous Material

2013 ◽  
pp. 225-249
Keyword(s):  
Heat Flow ◽  
Homogeneous Material

Ion thinning of integrated circuit transverse specimens for transmission electron microscopy

1992 ◽  
Vol 50 (2) ◽  
pp. 1426-1427
Author(s):  
F. Shaapur
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Integrated Circuit ◽  
Substrate Surface ◽  
Homogeneous Material ◽  
Material System ◽  
Ion Milling ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Motion Profile

Non-uniform ion-thinning of heterogenous material structures has constituted a fundamental difficulty in preparation of specimens for transmission electron microscopy (TEM). A variety of corrective procedures have been developed and reported for reducing or eliminating the effect. Some of these techniques are applicable to any non-homogeneous material system and others only to unidirectionalfy heterogeneous samples. Recently, a procedure of the latter type has been developed which is mainly based on a new motion profile for the specimen rotation during ion-milling. This motion profile consists of reversing partial revolutions (RPR) within a fixed sector which is centered around a direction perpendicular to the specimen heterogeneity axis. The ion-milling results obtained through this technique, as studied on a number of thin film cross-sectional TEM (XTEM) specimens, have proved to be superior to those produced via other procedures.XTEM specimens from integrated circuit (IC) devices essentially form a complex unidirectional nonhomogeneous structure. The presence of a variety of mostly lateral features at different levels along the substrate surface (consisting of conductors, semiconductors, and insulators) generally cause non-uniform results if ion-thinned conventionally.

Heat Flow Measurement by Force and Thermal Sensor Stick with Nerve-net LSI Chip

2019 ◽  
Vol 139 (8) ◽  
pp. 258-264
Author(s):  
Hayato Tsuchiya ◽  
Yusuke Suganuma ◽  
Masanori Muroyama ◽  
Takahiro Nakayama ◽  
Yutaka Nonomura
Keyword(s):  
Heat Flow ◽  
Flow Measurement ◽  
Thermal Sensor ◽  
Nerve Net

Đặc điểm thạch quyển khu vực Biển Đông, quan hệ của nó với dị thường dòng nhiệt

2018 ◽  
Vol 28 (2) ◽  
pp. 174-182
Author(s):  
Đinh Văn Toàn ◽  
Trịnh Việt Bắc
Keyword(s):  
Heat Flow ◽  
East Sea

About the Litttosphere in the East Sea region and its relation with heat flow anomalies

Sign in / Sign up

Export Citation Format

Share Document