Metal-Oxide-Based Gas-Sensor Devices

2011 ◽  
pp. 13-26
Keyword(s):  
Metal Oxide ◽  
Gas Sensor ◽  
Sensor Devices

scholarly journals PROCESS TECHNOLOGY OF FABRICATION NO2 GAS SENSOR DEVICES WITH ACTIVE LAYER In2O3

2016 ◽  
Vol 10 (1) ◽  
pp. 69
Author(s):  
Slamet Widodo
Keyword(s):  
Metal Oxide ◽  
Aluminum Oxide ◽  
Gas Sensor ◽  
Heat Distribution ◽  
Process Technology ◽  
Sensitive Layer ◽  
Resistance Change ◽  
No2 Gas Sensor ◽  
Sensor Device ◽  
Sensor Devices

This paper discuss the design and fabrication of NO<sub>2 </sub>gas sensor based on metal oxide using thick film technology was described. The design of gas sensor is consisted of components, i.e. heater, electrode (interdigital fingers) and sensitive layer from In<sub>2</sub>O<sub>3</sub> material. This sensor has been designed as multilayers with heater and both electrodes in one surface, in accordance with miniaturisation aspect, heat distribution and less consumption of energy from the sensor device. The heater and electrode were fabricated on alumina substrate (aluminum oxide/Al<sub>2</sub>O<sub>3</sub>) with silver paste. The In<sub>2</sub>O<sub>3 </sub>layer provides\ resistance change when it is exposed by NO<sub>2</sub> gas. It indicates that this sensor device has a potency to be used as NO<sub>2 </sub>detector.

scholarly journals PROCESS TECHNOLOGY OF FABRICATION NO2 GAS SENSOR DEVICES WITH ACTIVE LAYER In2O3

2018 ◽  
Vol 10 (1) ◽  
pp. 69
Author(s):  
Slamet Widodo
Keyword(s):  
Metal Oxide ◽  
Aluminum Oxide ◽  
Gas Sensor ◽  
Heat Distribution ◽  
Process Technology ◽  
Sensitive Layer ◽  
Resistance Change ◽  
No2 Gas Sensor ◽  
Sensor Device ◽  
Sensor Devices

This paper discuss the design and fabrication of NO<sub>2 </sub>gas sensor based on metal oxide using thick film technology was described. The design of gas sensor is consisted of components, i.e. heater, electrode (interdigital fingers) and sensitive layer from In<sub>2</sub>O<sub>3</sub> material. This sensor has been designed as multilayers with heater and both electrodes in one surface, in accordance with miniaturisation aspect, heat distribution and less consumption of energy from the sensor device. The heater and electrode were fabricated on alumina substrate (aluminum oxide/Al<sub>2</sub>O<sub>3</sub>) with silver paste. The In<sub>2</sub>O<sub>3 </sub>layer provides\ resistance change when it is exposed by NO<sub>2</sub> gas. It indicates that this sensor device has a potency to be used as NO<sub>2 </sub>detector.

scholarly journals A Micromachined Metal Oxide Composite Dual Gas Sensor System for Principal Component Analysis-Based Multi-Monitoring of Noxious Gas Mixtures

Micromachines ◽  
2019 ◽  
Vol 11 (1) ◽  
pp. 24
Author(s):  
In-Hwan Yang ◽  
Joon-Hyung Jin ◽  
Nam Ki Min
Keyword(s):  
Principal Component Analysis ◽  
Metal Oxide ◽  
Gas Sensor ◽  
Microelectromechanical Systems ◽  
Gas Sensing ◽  
Principal Component ◽  
Component Analysis ◽  
Oxide Semiconductor ◽  
Mixed Gas ◽  
Sensor Devices

Microelectronic gas-sensor devices were developed for the detection of carbon monoxide (CO), nitrogen dioxides (NO2), ammonia (NH3) and formaldehyde (HCHO), and their gas-sensing characteristics in six different binary gas systems were examined using pattern-recognition methods. Four nanosized gas-sensing materials for these target gases, i.e., Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and SnO2-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were fabricated using a microsensor platform. Principal component analysis of the experimental data from the microelectromechanical systems gas-sensor arrays under exposure to single gases and their mixtures indicated that identification of each individual gas in the mixture was successful. Additionally, the gas-sensing behavior toward the mixed gas indicated that the traditional adsorption and desorption mechanism of the n-type metal oxide semiconductor (MOS) governs the sensing mechanism of the mixed gas systems.

Metal-oxide based ammonia gas sensors: A review

2020 ◽  
Vol 10 ◽  
Author(s):  
Priya Gupta ◽  
Savita Maurya ◽  
Narendra Kumar Pandey ◽  
Vernica Verma
Keyword(s):  
Metal Oxide ◽  
Metal Oxides ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Review Paper ◽  
Gas Sensing ◽  
Gas Sensitivity ◽  
Ammonia Gas ◽  
Ammonia Sensing ◽  
Ammonia Gas Sensors

: This review paper encompasses a study of metal-oxide and their composite based gas sensors used for the detection of ammonia (NH3) gas. Metal-oxide has come into view as an encouraging choice in the gas sensor industry. This review paper focuses on the ammonia sensing principle of the metal oxides. It also includes various approaches adopted for increasing the gas sensitivity of metal-oxide sensors. Increasing the sensitivity of the ammonia gas sensor includes size effects and doping by metal or other metal oxides which will change the microstructure and morphology of the metal oxides. Different parameters that affect the performances like sensitivity, stability, and selectivity of gas sensors are discussed in this paper. Performances of the most operated metal oxides with strengths and limitations in ammonia gas sensing application are reviewed. The challenges for the development of high sensitive and selective ammonia gas sensor are also discussed.

scholarly journals Field Study of Metal Oxide Semiconductor Gas Sensors in Temperature Cycled Operation for Selective VOC Monitoring in Indoor Air

Atmosphere ◽  
2021 ◽  
Vol 12 (5) ◽  
pp. 647
Author(s):  
Tobias Baur ◽  
Johannes Amann ◽  
Caroline Schultealbert ◽  
Andreas Schütze
Keyword(s):  
Air Quality ◽  
Metal Oxide ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Indoor Air ◽  
Ambient Air ◽  
Quantitative Agreement ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
High Temporal Resolution

More and more metal oxide semiconductor (MOS) gas sensors with digital interfaces are entering the market for indoor air quality (IAQ) monitoring. These sensors are intended to measure volatile organic compounds (VOCs) in indoor air, an important air quality factor. However, their standard operating mode often does not make full use of their true capabilities. More sophisticated operation modes, extensive calibration and advanced data evaluation can significantly improve VOC measurements and, furthermore, achieve selective measurements of single gases or at least types of VOCs. This study provides an overview of the potential and limits of MOS gas sensors for IAQ monitoring using temperature cycled operation (TCO), calibration with randomized exposure and data-based models trained with advanced machine learning. After lab calibration, a commercial digital gas sensor with four different gas-sensitive layers was tested in the field over several weeks. In addition to monitoring normal ambient air, release tests were performed with compounds that were included in the lab calibration, but also with additional VOCs. The tests were accompanied by different analytical systems (GC-MS with Tenax sampling, mobile GC-PID and GC-RCP). The results show quantitative agreement between analytical systems and the MOS gas sensor system. The study shows that MOS sensors are highly suitable for determining the overall VOC concentrations with high temporal resolution and, with some restrictions, also for selective measurements of individual components.

Gas sensor based on a metal oxide nanowire forest built on a suspended carbon nano-heater

2018 ◽  
Author(s):  
Yeongjin Lim ◽  
Seungwook Lee ◽  
Yeong Min Kwon ◽  
Jeong Min Baik ◽  
Heungjoo Shin
Keyword(s):  
Metal Oxide ◽  
Gas Sensor

Metal Oxide Gas Sensor Arrays: Geometrical Design and Selectivity

2009 ◽  
Author(s):  
Frank Röck ◽  
Nicolae Barsan ◽  
Udo Weimar ◽  
Matteo Pardo ◽  
Giorgio Sberveglieri
Keyword(s):  
Metal Oxide ◽  
Gas Sensor ◽  
Sensor Arrays ◽  
Geometrical Design ◽  
Metal Oxide Gas Sensor ◽  
Gas Sensor Arrays

Pulsed laser deposition of metal oxide nanostructures for highly sensitive gas sensor applications

2016 ◽  
Vol 236 ◽  
pp. 978-987 ◽  
Author(s):  
Joni Huotari ◽  
Ville Kekkonen ◽  
Tomi Haapalainen ◽  
Martin Leidinger ◽  
Tilman Sauerwald ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Pulsed Laser Deposition ◽  
Gas Sensor ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Sensor Applications ◽  
Oxide Nanostructures ◽  
Highly Sensitive ◽  
Metal Oxide Nanostructures

Metal-oxide nanostructures produced by PLD in open air for gas sensor applications

2019 ◽  
Vol 470 ◽  
pp. 861-869 ◽  
Author(s):  
G. Atanasova ◽  
A. Og. Dikovska ◽  
T. Dilova ◽  
B. Georgieva ◽  
G.V. Avdeev ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Gas Sensor ◽  
Sensor Applications ◽  
Oxide Nanostructures ◽  
Metal Oxide Nanostructures
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