Electro Thermal Effects of Geometrically Modified MEMS-Based Micro Heater for Gas Sensing Applications

2019 ◽  
Vol 17 (9) ◽  
pp. 725-732
Author(s):  
Vishal Balasubramanian ◽  
V. S. Selvakumar ◽  
L. Sujatha ◽  
M. Revathi ◽  
C. V. Gayathri
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensing ◽  
Comsol Multiphysics ◽  
Low Power Consumption ◽  
Temperature Uniformity ◽  
Gas Sensitivity ◽  
Average Temperature ◽  
Sensing Applications ◽  
Sensitivity And Selectivity

Micro heaters play a major role in gas sensing applications owing to their accuracy, selectivity and low power consumption. The proposed micro heater employs a window type polysilicon micro-hotplate structure, which is a square cell of side 500 μm, designed using COMSOL Multiphysics. It is highly imperative that an evenly distributed temperature is necessary over the broad area of the heater in order to improve its gas sensitivity and selectivity. In this paper, we have explained the design and analysis of a novel window-type micro heater made of polysilicon. The main aim of the work is to achieve temperature uniformity and low power consumption. By optimizing the geometry of the micro heater, we can obtain both temperature uniformity and low power consumption. This geometrical optimization also improves the sensitivity and response time of the sensor. To support them, we have carried out simulations using COMSOL Multiphysics. The proposed structure has obtained a uniform temperature of 1134.1 K and an average temperature of 1130.39 K. Such high and uniform temperatures finds applications in gas sensors. This work also analyzes the proper choice and placement of electrodes across the geometry of the heater.

Improvement of Gas Sensing of Uniform Ag 3 PO 4 Nanoparticles to NH 3 under the Assistant of LED Lamp with Low Power Consumption at Room Temperature

2021 ◽  
Vol 6 (32) ◽  
pp. 8338-8344
Author(s):  
Xingyan Shao ◽  
Shuo Wang ◽  
Leqi Hu ◽  
Tingting Liu ◽  
Xiaomei Wang ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Room Temperature ◽  
Gas Sensing ◽  
Low Power Consumption

Mid-infrared gas sensing using uncooled quantum cascade laser with low power consumption

2019 ◽  
Author(s):  
Makoto Murata ◽  
Hiroyuki Yoshinaga ◽  
Takashi Kato ◽  
Hiroki Mori ◽  
Yukihiro Tsuji ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Quantum Cascade Laser ◽  
Gas Sensing ◽  
Low Power Consumption ◽  
Mid Infrared ◽  
Quantum Cascade

Ion Gel-Coated Graphene Transistor for Ethanol Gas Sensing

2021 ◽  
Vol 105 ◽  
pp. 3-7
Author(s):  
De Sheng Liu ◽  
Jiang Wu ◽  
Zhi Ming Wang
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Industrial Production ◽  
Gas Sensing ◽  
Drunk Driving ◽  
Fast Response ◽  
Low Power Consumption ◽  
Operating Voltage ◽  
Ethanol Sensor ◽  
Ion Gel

Ethanol sensor has been widely used in our daily life and industrial production, such as drunk driving test, food fermentation monitoring, and industrial gas leakage monitoring. With the advent of the Internet of Things (IoT) era, ethanol sensors will develop towards miniaturization and low-power consumption in the near future. However, traditional ethanol sensors with large volumes and high-power consumption are difficult to meet these requirements. Therefore, it is urgent to study ethanol gas sensors based on new materials and new structures. Here, we demonstrated a flexible ethanol sensor based on an ion gel-coated graphene field-effect transistor (IGFET). The device has a small graphene channel size with a width of 300 μm and a length of 200 μm. The device showed a low operating voltage of less than |±1| V. When the device was put into an ethanol gas condition, the Dirac point voltage of the IGFET showed a negative shift, which means an n-type doping effect to the graphene channel. Furthermore, the sensor showed a normalized current change of-11% against an ethanol gas concentration of 78.51 g/L at a constant drain-source voltage of 0.1 V. In addition, the device exhibited a fast response time of ~10 s and a recovery time of ~18 s. Moreover, the detectable range of the device was found to as wide as 19.76-785.1 g/L. Based on the above results, the flexible IGFET-based ethanol sensor with small size and low-power consumption has great potential to be used in the industrial production of the IoT era.

Design and Fabrication of a MEMS-Based Gas Sensor

2009 ◽  
Vol 74 ◽  
pp. 255-258 ◽  
Author(s):  
Jin Ho Yoon ◽  
Jung Sik Kim
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Sol Gel ◽  
High Sensitivity ◽  
Low Power Consumption ◽  
Potential Candidate ◽  
Gas Sensitivity ◽  
Thin Film Layer ◽  
Sol Gel Process

In this study, the micro gas sensor for NOx gas was fabricated by using a MEMS technology and sol-gel process. The sensing electrode and micro heater were designed to be a co-planar typed structure in the Pt thin film layer. The fabricated micro platform had a low power consumption of 67 mW at 2.0 V of heater voltage and 300°C of operating temperature. Indium oxide as a sensing material for NOx gas was synthesized by a sol-gel process with indium isopropoxide. The particle size of synthesized In2O3 was identified as about 50 nm. The maximum gas sensitivity as relative resistance (Rs = Rgas / Rair) occurred at 300°C with the value of 8.0 at 1 ppm NO2 gas. The present study shows that a MEMS-based gas sensor is a potential candidate for the automobile AQS (air quality system) gas sensor with many advantages of small dimension, high sensitivity, short response time and low power consumption.

scholarly journals Miniaturised Infrared Spectrophotometer for Low Power Consumption Multi-Gas Sensing

Sensors ◽  
2020 ◽  
Vol 20 (14) ◽  
pp. 3843
Author(s):  
Manu Muhiyudin ◽  
David Hutson ◽  
Desmond Gibson ◽  
Ewan Waddell ◽  
Shigeng Song ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Gas Sensing ◽  
Optical Filters ◽  
Low Power Consumption ◽  
Practical Implementation ◽  
Pass Band ◽  
Concept Design ◽  
Infrared Source

Concept, design and practical implementation of a miniaturized spectrophotometer, utilized as a mid-infrared-based multi gas sensor is described. The sensor covers an infrared absorption wavelength range of 2.9 to 4.8 um, providing detection capabilities for carbon dioxide, carbon monoxide, nitrous oxide, sulphur dioxide, ammonia and methane. A lead selenide photo-detector array and customized MEMS-based micro-hotplate are used as the detector and broadband infrared source, respectively. The spectrophotometer optics are based on an injection moulded Schwarzschild configuration incorporating optical pass band filters for the spectral discrimination. This work explores the effects of using both fixed-line pass band and linear variable optical filters. We report the effectiveness of this low-power-consumption miniaturized spectrophotometer as a stand-alone single and multi-gas sensor, usage of a distinct reference channel during gas measurements, development of ideal optical filters and spectral control of the source and detector. Results also demonstrate the use of short-time pulsed inputs as an effective and efficient way of operating the sensor in a low-power-consumption mode. We describe performance of the spectrometer as a multi-gas sensor, optimizing individual component performances, power consumption, temperature sensitivity and gas properties using modelling and customized experimental procedures.

scholarly journals Dataset of the Optimization of a Low Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Data ◽  
2021 ◽  
Vol 6 (3) ◽  
pp. 30
Author(s):  
Andrea Gaiardo ◽  
David Novel ◽  
Elia Scattolo ◽  
Alessio Bucciarelli ◽  
Pierluigi Bellutti ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Failure Analysis ◽  
Gas Sensor ◽  
Mechanical Stability ◽  
Low Cost ◽  
Mechanical Failure ◽  
Sensor Technology ◽  
Low Power Consumption ◽  
Sensing Applications

Over the last few years, employment of the standard silicon microfabrication techniques for the gas sensor technology has allowed for the development of ever-small, low-cost, and low-power consumption devices. Specifically, the development of silicon microheaters (MHs) has become well established to produce MOS gas sensors. Therefore, the development of predictive models that help to define a priori the optimal design and layout of the device have become crucial, in order to achieve both low power consumption and high mechanical stability. In this research dataset, we present the experimental data collected to develop a specific and useful predictive thermal-mechanical model for high performing silicon MHs. To this aim, three MH layouts over three different membrane sizes were developed by using the standard silicon microfabrication process. Thermal and mechanical performances of the produced devices were experimentally evaluated, by using probe stations and mechanical failure analysis, respectively. The measured thermal curves were used to develop the predictive thermal model towards low power consumption. Moreover, a statistical analysis was finally introduced to cross-correlate the mechanical failure results and the thermal predictive model, aiming at MH design optimization for gas sensing applications. All the data collected in this investigation are shown.

Low power‐consumption mid‐infrared distributed feedback quantum cascade laser for gas‐sensing application

2017 ◽  
Vol 53 (8) ◽  
pp. 549-551 ◽  
Author(s):  
J. Hashimoto ◽  
H. Yoshinaga ◽  
H. Mori ◽  
Y. Tsuji ◽  
M. Murata ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Quantum Cascade Laser ◽  
Gas Sensing ◽  
Distributed Feedback ◽  
Low Power Consumption ◽  
Mid Infrared ◽  
Quantum Cascade ◽  
Sensing Application

Design and Fabrication of Low-Power Planar Type Gas Sensor

2011 ◽  
Vol 694 ◽  
pp. 580-584
Author(s):  
Zi Li Zhang ◽  
Chen Bo Yin ◽  
Chun Min Tao ◽  
Bin Zhu
Keyword(s):  
Low Power ◽  
Gas Sensing ◽  
Element Model ◽  
Low Power Consumption ◽  
Sensing Applications ◽  
Sensitive Film ◽  
Suspended Structure ◽  
Homogeneous Temperature ◽  
The Finite Element Model ◽  
Sensing Performance

In this paper we describe the fabrication steps and the implementation of a planar type gas sensing applications with suspended structure, which presents very low power consumption. Simulations with the finite element model tool show homogeneous temperature distribution across the sensitive film. The device attached with a spin-coated thin layer of SnO2 showed a reasonable sensing performance to hydrogen.

An ultra-sensitive gas sensor based on two-dimensional manganese porphyrin monolayer

2021 ◽  
Author(s):  
Ze-Wen Hao ◽  
Mi-Mi Dong ◽  
Rui Qin Zhang ◽  
Chuankui Wang ◽  
Xiaoxiao Fu
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Room Temperature ◽  
Gas Sensing ◽  
Environmental Safety ◽  
Low Power Consumption ◽  
Two Dimensional ◽  
Manganese Porphyrin ◽  
Highly Sensitive ◽  
Important Solution

The development of highly sensitive, low-power consumption, stable and recyclable gas sensing devices at room temperature has become an important solution for the environmental safety detection. Utilizing two-dimensional metalloporphyrin monolayer...

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