Gas Sensing Characteristics of MoO3 Thin Films Prepared by Glancing Angle Magnetron Sputtering

2017 ◽  
Vol 15 (6) ◽  
pp. 517-524 ◽  
Author(s):  
Artur Rydosz ◽  
Magdalena Ziabka ◽  
Dagmara Michon ◽  
Jaroslaw Kanak ◽  
Wojciech Maziarz ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Gas Sensing ◽  
Glancing Angle ◽  
Sensing Characteristics

scholarly journals Developing GLAD Parameters to Control the Deposition of Nanostructured Thin Film

Sensors ◽  
2022 ◽  
Vol 22 (2) ◽  
pp. 651
Author(s):  
Jakub Bronicki ◽  
Dominik Grochala ◽  
Artur Rydosz
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Glancing Angle Deposition ◽  
Metal Oxide Thin Films ◽  
Nanostructured Thin Film ◽  
Sensing Applications ◽  
Deposition Parameters ◽  
Glancing Angle ◽  
Glad Technique ◽  
Relative Errors

In this paper, we describe the device developed to control the deposition parameters to manage the glancing angle deposition (GLAD) process of metal-oxide thin films for gas-sensing applications. The GLAD technique is based on a set of parameters such as the tilt, rotation, and substrate temperature. All parameters are crucial to control the deposition of nanostructured thin films. Therefore, the developed GLAD controller enables the control of all parameters by the scientist during the deposition. Additionally, commercially available vacuum components were used, including a three-axis manipulator. High-precision readings were tested, where the relative errors calculated using the parameters provided by the manufacturer were 1.5% and 1.9% for left and right directions, respectively. However, thanks to the formula developed by our team, the values were decreased to 0.8% and 0.69%, respectively.

scholarly journals Ammonia, acetone and ethanol gas sensing characteristics of CuO thin films grown by sputtering

2018 ◽  
Vol 360 ◽  
pp. 012062
Author(s):  
Anju Anna Jacob ◽  
L. Balakrishnan ◽  
S. R. Meher ◽  
R. Sivacoumar ◽  
K. Shambavi ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Sensing Characteristics

Bending stress induced improved chemiresistive gas sensing characteristics of flexible cobalt-phthalocyanine thin films

2013 ◽  
Vol 102 (13) ◽  
pp. 132107 ◽  
Author(s):  
Ajay Singh ◽  
Ashwini Kumar ◽  
Arvind Kumar ◽  
S. Samanta ◽  
Nirav Joshi ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Cobalt Phthalocyanine ◽  
Bending Stress ◽  
Sensing Characteristics
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