Influence of Gas Pressure in Radio Frequency Sputtering on Microstructure and Optical Properties of VO2(M) Thin Films

2012 ◽  
Vol 4 (2) ◽  
pp. 351-355 ◽  
Author(s):  
Y. H. Tian ◽  
S. S. Pan ◽  
Y. Y. Luo ◽  
G. H. Li
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Radio Frequency ◽  
Gas Pressure ◽  
Radio Frequency Sputtering

Optical properties of Mn-Co-Ni-O thin films prepared by radio frequency sputtering deposition

2014 ◽  
Vol 115 (9) ◽  
pp. 093512 ◽  
Author(s):  
Wei Zhou ◽  
Jing Wu ◽  
Cheng Ouyang ◽  
Yanqing Gao ◽  
Xiaofeng Xu ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Radio Frequency ◽  
Sputtering Deposition ◽  
Radio Frequency Sputtering

Magneto-optical properties of yttrium iron garnet (YIG) thin films elaborated by radio frequency sputtering

2004 ◽  
Vol 284 ◽  
pp. 77-85 ◽  
Author(s):  
T. Boudiar ◽  
B. Payet-Gervy ◽  
M.-F. Blanc-Mignon ◽  
J.-J. Rousseau ◽  
M. Le Berre ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Radio Frequency ◽  
Yttrium Iron Garnet ◽  
Yttrium Iron ◽  
Radio Frequency Sputtering ◽  
Iron Garnet

Photoluminescence Spectroscopy of Si:SiO2 Films Fabricated by Radio Frequency Sputtering

2018 ◽  
Vol 790 ◽  
pp. 37-42
Author(s):  
Koichi Tanaka ◽  
Kanami Okamoto
Keyword(s):  
Optical Properties ◽  
Silicon Dioxide ◽  
Radio Frequency ◽  
Photoluminescence Spectroscopy ◽  
Gas Pressure ◽  
Pl Spectra ◽  
Composition Ratio ◽  
Radio Frequency Sputtering ◽  
Silicon Nanocrystallites ◽  
Ar Gas

We fabricated Si:SiO2 films including silicon nanocrystallites as one of nanoscale materials, which were prepared by co-sputtering of silicon and silicon dioxide. Optical properties of these films were analyzed by photoluminescence spectroscopy. Specimens fabricated at higher pressure between 0.3 Pa to 0.9 Pa emitted photoluminescence strongly. Photoluminescence was strong at shorter wavelength. In case fabricated in same Ar gas pressure, specimens that had composition ratio, 0.04, of the silicon for target emitted the photoluminescence strongly. Peaks existed on some PL spectra of specimen fabricated by the Ar gas pressure 0.3, 0.5 Pa and the composition ratio 0.04. Suppose that silicon nanocrystallites were fabricated, these size were few nm.

Magneto-optical properties of yttrium iron garnet (YIG) thin films elaborated by radio frequency sputtering

2004 ◽  
Author(s):  
Toufik Boudiar ◽  
Beatrice Payet-Gervy ◽  
Marie-Francoise Blanc-Mignon ◽  
Jean-Jacques Rousseau ◽  
Martine Le Berre ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Radio Frequency ◽  
Yttrium Iron Garnet ◽  
Yttrium Iron ◽  
Radio Frequency Sputtering ◽  
Iron Garnet
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