AlN-based surface acoustic wave resonators for temperature sensing applications

2015 ◽  
Vol 5 (4) ◽  
pp. 367-370 ◽  
Author(s):  
Chuan Li ◽  
Xingzhao Liu ◽  
Lin Shu ◽  
Yanrong Li
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Temperature Sensing ◽  
Sensing Applications ◽  
Acoustic Wave Resonators

Fast simulation method of Distributed Nonlinearities in Surface Acoustic Wave Resonators

2020 ◽  
Author(s):  
M Gonzalez-Rodriguez ◽  
Carlos Collado ◽  
Jordi Mateu ◽  
J.M. Gonzalez-Arbesu ◽  
Sebastian Huebner ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Simulation Method ◽  
Fast Simulation ◽  
Fast Simulation Method ◽  
Acoustic Wave Resonators

Pressure sensor based on surface acoustic wave resonators

2008 ◽  
Author(s):  
M. Benetti ◽  
D. Cannata ◽  
F. Di Pietrantonio ◽  
C. Marchiori ◽  
P. Persichetti ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Pressure Sensor ◽  
Acoustic Wave Resonators

Carbon nanotube growth on piezoelectric AlN films: influence of catalyst underlayers

RSC Advances ◽  
2015 ◽  
Vol 5 (98) ◽  
pp. 80682-80687 ◽  
Author(s):  
T. Mirea ◽  
J. Olivares ◽  
M. Clement ◽  
M. DeMiguel-Ramos ◽  
J. de Frutos ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Acoustic Wave ◽  
High Quality ◽  
Catalyst Nanoparticles ◽  
Sensing Applications ◽  
Carbon Nanotube Growth ◽  
Nanotube Growth ◽  
Acoustic Wave Resonators

Integration of carbon nanotube (CNT) forests in acoustic wave resonators has appeared interesting for sensing applications. High quality CNTs can be grown on piezoelectric AlN by using a stabilising layer for catalyst nanoparticles.

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