Experimental and Theoretical Study of the Optical and Electrical Properties of Nanostructured Indium Tin Oxide Fabricated by Oblique-Angle Deposition

2012 ◽  
Vol 12 (5) ◽  
pp. 3950-3953 ◽  
Author(s):  
Adam W. Sood ◽  
David J. Poxson ◽  
Frank W. Mont ◽  
Sameer Chhajed ◽  
Jaehee Cho ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Theoretical Study ◽  
Oblique Angle Deposition ◽  
Optical And Electrical Properties ◽  
Oblique Angle ◽  
Angle Deposition

Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition

2008 ◽  
Vol 23 (9) ◽  
pp. 2500-2505 ◽  
Author(s):  
Y. Zhong ◽  
Y.C. Shin ◽  
C.M. Kim ◽  
B.G. Lee ◽  
E.H. Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Incident Angle ◽  
Oblique Angle Deposition ◽  
Optical And Electrical Properties ◽  
Oblique Angle ◽  
Angle Deposition ◽  
Flux Incident

The optical and electrical properties of “tilted” and “spiral” indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.

Optical and electrical properties of SnO2:Sb thin films deposited by oblique angle deposition

2010 ◽  
Vol 256 (6) ◽  
pp. 1636-1640 ◽  
Author(s):  
Xiudi Xiao ◽  
Guoping Dong ◽  
Jianda Shao ◽  
Hongbo He ◽  
Zhengxiu Fan
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Oblique Angle Deposition ◽  
Optical And Electrical Properties ◽  
Oblique Angle ◽  
Angle Deposition
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