A Low Dielectric Study on Hybrid Plasma-Polymer Thin Films of Different Ratio Between Toluene and TEOS

2011 ◽  
Vol 11 (6) ◽  
pp. 5323-5327 ◽  
Author(s):  
S.-J. Cho ◽  
D. Jung ◽  
J.-H. Boo
Keyword(s):  
Thin Films ◽  
Polymer Thin Films ◽  
Plasma Polymer ◽  
Dielectric Study ◽  
Low Dielectric ◽  
Hybrid Plasma

The Optical and Mechanical Properties of Toluene-TEOS Hybrid Plasma-Polymer Thin Films Deposited by PECVD

2009 ◽  
Vol 55 (5(1)) ◽  
pp. 1780-1784
Author(s):  
Sang-Jin Cho ◽  
In-Seob Bae ◽  
Jin-Hyo Boo ◽  
Sungwoo Lee ◽  
Donggeun Jung
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Polymer Thin Films ◽  
Plasma Polymer ◽  
Hybrid Plasma ◽  
Optical And Mechanical Properties

A STUDY OF THE CHARACTERISTICS OF ORGANIC–INORGANIC HYBRID PLASMA-POLYMER THIN FILMS BY CO-DEPOSITION OF TOLUENE AND TEOS

2010 ◽  
Vol 17 (03) ◽  
pp. 353-358 ◽  
Author(s):  
SANG-JIN CHO ◽  
SUNGWOO LEE ◽  
DONGGEUN JUNG ◽  
JIN-HYO BOO
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Polymer Thin Films ◽  
Chemical Vapor ◽  
Dielectric Constants ◽  
Plasma Polymer ◽  
Hybrid Polymer ◽  
Inorganic Hybrid ◽  
Hybrid Plasma ◽  
Ft Ir

We investigated the interaction of varied plasma power with ultralow-κ Toluene–TEOS hybrid plasma-polymer thin films, as well as changes in electrical and mechanical properties with various mixture ratios of toluene and TEOS (tetraethoxysilane). Using the plasma enhanced chemical vapor deposition (PECVD) method, organic–inorganic hybrid polymer thin films were deposited on silicon(100) substrates under 150°C of wall temperature and a ratio of TEOS to toluene. Toluene and TEOS were utilized as organic and inorganic precursors, and hydrogen and argon were used as bubbler and carrier gases, respectively. In order to compare the differences in the electrical and the mechanical properties of plasma polymerized thin films, we grew the hybrid polymer thin films under 30 W of RF (radio frequency using 13.56 MHz) power with various ratios of toluene to TEOS. The as-grown polymerized thin films were first analyzed by Fourier Transform Infrared (FT-IR) spectroscopy, and Atomic Force Microscopy (AFM). The results of FT-IR showed that the hybrid polymer thin films were totally fragmented and polymerized with increasing RF power. AFM showed that polymer films with smooth surface could be grown under various deposition conditions. An impedance analyzer was utilized for the measurements of capacitance values for dielectric constants and the thin films were analyzed for hardness and Young's modulus using a nanoindenter.

Study on the Plasma-Polymer Thin Films Deposited by Using PECVD and Application Tests for Low-k Insulator

2008 ◽  
Vol 53 (3) ◽  
pp. 1634-1637 ◽  
Author(s):  
S.-J. Cho ◽  
I.-S. Bae ◽  
J.-H. Boo ◽  
Y. S. Park ◽  
B. Hong
Keyword(s):  
Thin Films ◽  
Polymer Thin Films ◽  
Plasma Polymer ◽  
Low K

Nanopatterning of Plasma Polymer Thin Films by ArF Photolithography: Impact of Polymer Structure on Patterning Properties

2010 ◽  
Vol 7 (7) ◽  
pp. 571-581 ◽  
Author(s):  
Ali Dirani ◽  
Fernand Wieder ◽  
Vincent Roucoules ◽  
Aissam Airoudj ◽  
Olivier Soppera
Keyword(s):  
Thin Films ◽  
Polymer Thin Films ◽  
Polymer Structure ◽  
Plasma Polymer

scholarly journals Retention of Antibacterial Activity in Geranium Plasma Polymer Thin Films

Nanomaterials ◽  
2017 ◽  
Vol 7 (9) ◽  
pp. 270 ◽  
Author(s):  
Ahmed Al-Jumaili ◽  
Kateryna Bazaka ◽  
Mohan Jacob
Keyword(s):  
Thin Films ◽  
Antibacterial Activity ◽  
Polymer Thin Films ◽  
Plasma Polymer

Controlling the Morphogenesis of Needle-Like and Multibranched Structures in Maleic Anhydride Plasma Polymer Thin Films

2014 ◽  
Vol 11 (10) ◽  
pp. 943-951 ◽  
Author(s):  
Michel M. Brioude ◽  
Marie-Pierre Laborie ◽  
Aissam Airoudj ◽  
Hamidou Haidara ◽  
Vincent Roucoules
Keyword(s):  
Thin Films ◽  
Maleic Anhydride ◽  
Polymer Thin Films ◽  
Plasma Polymer

Scanning probe microscopy for the analysis of composite Ti/hydrocarbon plasma polymer thin films

2008 ◽  
Vol 602 (5) ◽  
pp. 1011-1019 ◽  
Author(s):  
A. Choukourov ◽  
A. Grinevich ◽  
D. Slavinska ◽  
H. Biederman ◽  
N. Saito ◽  
...  
Keyword(s):  
Thin Films ◽  
Scanning Probe Microscopy ◽  
Polymer Thin Films ◽  
Plasma Polymer ◽  
Scanning Probe ◽  
Probe Microscopy
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