Effect of Bias Voltage on Microstructure and Mechanical Properties of Nanocrystalline TiN Films Deposited by Reactive Magnetron Sputtering

Sung-Yong Chun

doi:10.1166/jnn.2011.3361

Effect of Bias Voltage on Microstructure and Mechanical Properties of Nanocrystalline TiN Films Deposited by Reactive Magnetron Sputtering

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.3361 ◽

2011 ◽

Vol 11 (2) ◽

pp. 1758-1761 ◽

Cited By ~ 1

Author(s):

Sung-Yong Chun

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Bias Voltage ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tin Films ◽

Microstructure And Mechanical Properties

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Effect of SiC thickness on microstructure and mechanical properties of (AlCrTiZrV)N/SiC nano-multilayers film synthesized by reactive magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2021.138724 ◽

2021 ◽

pp. 138724

Author(s):

Bohan Li ◽

Xun Ma ◽

Wei Li ◽

Qingqing Zhai ◽

Ping Liu ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties

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Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2011.03.062 ◽

2011 ◽

Vol 205 (19) ◽

pp. 4471-4479 ◽

Cited By ~ 11

Author(s):

Andrzej Czyżniewski ◽

Witold Gulbiński ◽

György Radnóczi ◽

Marianna Szerencsi ◽

Mieczysław Pancielejko

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties

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Bias voltage effect on the properties of TiN films by reactive magnetron sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.56.1134 ◽

2010 ◽

Vol 56 (4) ◽

pp. 1134-1139 ◽

Cited By ~ 13

Author(s):

Sung-Yong CHUN

Keyword(s):

Magnetron Sputtering ◽

Bias Voltage ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tin Films

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Microstructure and mechanical properties of vanadium carbide coatings synthesized by reactive magnetron sputtering

International Journal of Refractory Metals and Hard Materials ◽

10.1016/j.ijrmhm.2008.09.014 ◽

2009 ◽

Vol 27 (3) ◽

pp. 611-614 ◽

Cited By ~ 23

Author(s):

Xiaoyan Wu ◽

Guangze Li ◽

Yanghui Chen ◽

Geyang Li

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Vanadium Carbide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties ◽

Carbide Coatings

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Influence of Si content on the microstructure and mechanical properties of VSiN films deposited by reactive magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2016.05.030 ◽

2016 ◽

Vol 131 ◽

pp. 51-57 ◽

Cited By ~ 12

Author(s):

Junhua Xu ◽

Jian Chen ◽

Lihua Yu

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties ◽

Si Content

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Effect of gas flow ratio on the microstructure and mechanical properties of boron phosphide films prepared by reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2011.08.067 ◽

2011 ◽

Vol 258 (1) ◽

pp. 356-360 ◽

Cited By ~ 4

Author(s):

Z.C. Jia ◽

J.Q. Zhu ◽

C.Z. Jiang ◽

W.X. Shen ◽

J.C. Han ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Gas Flow ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Flow Ratio ◽

Boron Phosphide ◽

Microstructure And Mechanical Properties ◽

Gas Flow Ratio

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Microstructure and mechanical properties of hafnium carbide coatings synthesized by reactive magnetron sputtering

Journal of Coatings Technology and Research ◽

10.1007/s11998-009-9225-x ◽

2009 ◽

Vol 7 (3) ◽

pp. 403-407 ◽

Cited By ~ 19

Author(s):

Guanqun Li ◽

Geyang Li

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Hafnium Carbide ◽

Microstructure And Mechanical Properties ◽

Carbide Coatings

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Microstructure and mechanical properties of (AlCrTiZrV)Nx high-entropy alloy nitride films by reactive magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2020.109706 ◽

2020 ◽

Vol 181 ◽

pp. 109706 ◽

Cited By ~ 1

Author(s):

Liqiang Chen ◽

Wei Li ◽

Ping Liu ◽

Ke Zhang ◽

Fengcang Ma ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

High Entropy Alloy ◽

Reactive Magnetron ◽

High Entropy ◽

Microstructure And Mechanical Properties

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Influence of deposition conditions on the microstructure and mechanical properties of Ti–Si–N films by DC reactive magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(02)00833-7 ◽

2002 ◽

Vol 420-421 ◽

pp. 360-365 ◽

Cited By ~ 93

Author(s):

Soo Hyun Kim ◽

Jong Kuk Kim ◽

Kwang Ho Kim

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties ◽

Dc Reactive Magnetron Sputtering ◽

Deposition Conditions

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Effect of Silicon Content on the Microstructure and Mechanical Properties of TiAlSiN Coatings Prepared by Reactive Magnetron Sputtering

Advances in Materials Science and Applications ◽

10.5963/amsa0401001 ◽

2015 ◽

Vol 4 (1) ◽

pp. 1-9

Author(s):

Xudong Sui ◽

Guojian Li ◽

Qiang Wang ◽

Huan Qi ◽

Xiangkui Zhou ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Silicon Content ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties

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