Excimer Laser Induced Nanostructuring of Silicon Surfaces

2009 ◽  
Vol 9 (5) ◽  
pp. 3224-3232 ◽  
Author(s):  
Prashant Kumar ◽  
Mamidipudi Ghanashyam Krishna ◽  
Ashok Bhattacharya
Keyword(s):  
Excimer Laser ◽  
Silicon Surfaces

The modeling of excimer laser particle removal from hydrophilic silicon surfaces

2000 ◽  
Vol 87 (8) ◽  
pp. 3618-3627 ◽  
Author(s):  
X. Wu ◽  
E. Sacher ◽  
M. Meunier
Keyword(s):  
Excimer Laser ◽  
Silicon Surfaces ◽  
Particle Removal

KrF excimer laser dry and steam cleaning of silicon surfaces with metallic particulate contaminants

2002 ◽  
Vol 74 (2) ◽  
pp. 191-199 ◽  
Author(s):  
P. Neves ◽  
M. Arronte ◽  
R. Vilar ◽  
A.M. Botelho do Rego
Keyword(s):  
Excimer Laser ◽  
Silicon Surfaces ◽  
Krf Excimer Laser ◽  
Particulate Contaminants

Excimer Laser Induced Removal of Particles from Hydrophilic Silicon Surfaces

1999 ◽  
Vol 70 (1-2) ◽  
pp. 167-178 ◽  
Author(s):  
X. Wu ◽  
E. Sacher ◽  
M. Meunier
Keyword(s):  
Excimer Laser ◽  
Silicon Surfaces
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