SiGe Nanowire Field Effect Transistors
2008 ◽
Vol 8
(1)
◽
pp. 457-460
◽
Si0.5Ge0.5 nanowires have been utilized to fabricate source-drain channels of p-type field effect transistors (p-FETs). These transistors were fabricated using two methods, focused ion beam (FIB) and electron beam lithography (EBL). The electrical analyses of these devices show field effect transistor characteristics. The boron-doped SiGe p-FETs with a high-k (HfO2) insulator and Pt electrodes, made via FIB produced devices with effective hole mobilities of about 50 cm2V−1s−1. Similar transistors with Ti/Au electrodes made via EBL had effective hole mobilities of about 350 cm2V−1s−1.
2004 ◽
Vol 43
(No. 12B)
◽
pp. L1575-L1577
◽
1997 ◽
Vol 15
(6)
◽
pp. 2342