S.I.D.O.M. Detector, Surface Imaging Detector of Matter

2016 ◽  
Vol 5 (1) ◽  
pp. 49-54
Author(s):  
Domenico Bassani ◽  
Daniele Schito
Author(s):  
J. A. Panitz

Point-projection microscopy is an attractive surface imaging modality. High magnification, resolution, and contrast are easily achieved by radially projecting charged particles from a specimen mounted several centimeters in front of an imaging detector within a vacuum environment. Stigmation, drift and alignment problems are negligible, or nonexistent. The trick is to generate charged particles at or near the surface of the specimen that must coincide with the surface of a smoothly curved, conducting electrode of radius R. A potential difference applied between this electrode and a counter electrode, coincident with the detector surface, accelerates the charged particles radially into space. When the charged particles reach the detector they will have magnified their point of origin at the specimen surface by ∼D/R, where D is the separation of the electrodes. For D ∼10 cm and R ∼100 nm, the magnification is ∼106. If the particles have a forward velocity much greater than their lateral velocity (and a small DeBroglie wavelength), a highly resolved image of the specimen surface will appear at the detector.


Author(s):  
William Krakow ◽  
Alec N. Broers

Low-loss scanning electron microscopy can be used to investigate the surface topography of solid specimens and provides enhanced image contrast over secondary electron images. A high resolution-condenser objective lens has allowed the low-loss technique to resolve separations of Au nucleii of 50Å and smaller dimensions of 25Å in samples coated with a fine grained carbon-Au-palladium layer. An estimate of the surface topography of fine grained vapor deposited materials (20 - 100Å) and the surface topography of underlying single crystal Si in the 1000 - 2000Å range has also been investigated. Surface imaging has also been performed on single crystals using diffracted electrons scattered through 10−2 rad in a conventional TEM. However, severe tilting of the specimen is required which degrades the resolution 15 to 100 fold due to image forshortening.


Author(s):  
Kenneth Krieg ◽  
Richard Qi ◽  
Douglas Thomson ◽  
Greg Bridges

Abstract A contact probing system for surface imaging and real-time signal measurement of deep sub-micron integrated circuits is discussed. The probe fits on a standard probe-station and utilizes a conductive atomic force microscope tip to rapidly measure the surface topography and acquire real-time highfrequency signals from features as small as 0.18 micron. The micromachined probe structure minimizes parasitic coupling and the probe achieves a bandwidth greater than 3 GHz, with a capacitive loading of less than 120 fF. High-resolution images of submicron structures and waveforms acquired from high-speed devices are presented.


1983 ◽  
Vol 208 (1-3) ◽  
pp. 427-433 ◽  
Author(s):  
M.G. Fedotov ◽  
E.A. Kuper ◽  
V.N. Litvinenko ◽  
V.E. Panchenko ◽  
V.A. Ushakov

2015 ◽  
Vol 42 (4) ◽  
pp. 1690-1697 ◽  
Author(s):  
Guang Li ◽  
Hailiang Huang ◽  
Jie Wei ◽  
Diana G. Li ◽  
Qing Chen ◽  
...  

2012 ◽  
Vol 84 (3) ◽  
pp. S290-S291
Author(s):  
H. Pan ◽  
L.I. Cerviño ◽  
T. Pawlicki ◽  
S.B. Jiang ◽  
J. Alksne ◽  
...  

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