scholarly journals Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films

2017 ◽  
Vol 2017 ◽  
pp. 1-7 ◽  
Author(s):  
Jeng-Cheng Liu ◽  
Yuang-Tung Cheng ◽  
Sheng-Yun Ho ◽  
Hsien-Sen Hung ◽  
Shun-Hsyung Chang
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
High Sensitivity ◽  
Water Tank ◽  
Epitaxial Thin Films ◽  
Element Analysis ◽  
Pzt Films ◽  
Communication Devices ◽  
Mems Process

This paper presents a high-sensitivity hydrophone fabricated with a Microelectromechanical Systems (MEMS) process using epitaxial thin films grown on silicon wafers. The evaluated resonant frequency was calculated through finite-element analysis (FEA). The hydrophone was designed, fabricated, and characterized by different measurements performed in a water tank, by using a pulsed sound technique with a sensitivity of −190 dB ± 2 dB for frequencies in the range 50–500 Hz. These results indicate the high-performance miniaturized acoustic devices, which can impact a variety of technological applications.

Electrothermal Characterization of Doped-Si Heated Microcantilevers Under Periodic Heating Operation

2016 ◽  
Vol 138 (5) ◽  
Author(s):  
Sina Hamian ◽  
Andrew M. Gauffreau ◽  
Timothy Walsh ◽  
Jungchul Lee ◽  
Keunhan Park
Keyword(s):  
Microelectromechanical Systems ◽  
Transfer Functions ◽  
Design Parameters ◽  
Periodic Heating ◽  
Element Analysis ◽  
Full Spectrum ◽  
Frequency Dependent ◽  
Thermal Transfer ◽  
Fea Model

This paper reports the frequency-dependent electrothermal behaviors of a freestanding doped-silicon heated microcantilever probe operating under periodic (ac) Joule heating. We conducted a frequency-domain finite-element analysis (FEA) and compared the steady periodic solution with 3ω experiment results. The computed thermal transfer function of the cantilever accurately predicts the ac electrothermal behaviors over a full spectrum of operational frequencies, which could not be accomplished with the 1D approximation. In addition, the thermal transfer functions of the cantilever in vacuum and in air were compared, through which the frequency-dependent heat transfer coefficient of the air was quantified. With the developed FEA model, design parameters of the cantilever (i.e., the size and the constriction width of the cantilever heater) and their effects on the ac electrothermal behaviors were carefully investigated. Although this work focused on doped-Si heated microcantilever probes, the developed FEA model can be applied for the ac electrothermal analysis of general microelectromechanical systems.

scholarly journals Separation and characterization of pentacarboxylic porphyrinogen isomers by high-performance liquid chromatography with electrochemical detection

1987 ◽  
Vol 243 (2) ◽  
pp. 621-623 ◽  
Author(s):  
F Li ◽  
C K Lim ◽  
T J Peters
Keyword(s):  
High Performance Liquid Chromatography ◽  
Liquid Chromatography ◽  
Electrochemical Detection ◽  
High Performance ◽  
High Sensitivity ◽  
Reversed Phase ◽  
Small Scale ◽  
Preparative Isolation ◽  
Naturally Occurring

A reversed-phase h.p.l.c. system is described for the separation of all five naturally occurring pentacarboxylic porphyrinogen isomers. The compounds are detected electrochemically with high sensitivity. The peaks are positively identified by h.p.l.c. analysis of the pentacarboxylic porphyrinogens from reduction of pentacarboxylic porphyrins prepared by partial decarboxylation of hexa- and hepta-carboxylic porphyrin III of known structures. The resolution of pentacarboxylic porphyrinogens is superior to that of the porphyrins and the method is applicable to the small-scale preparative isolation of pure isomers.

Modeling Development of a High-Sensitivity Escherichia coli O157:H7 Detection Based on SH SAW Sensor

2014 ◽  
Vol 925 ◽  
pp. 595-599
Author(s):  
Seng Teik Ten ◽  
Uda Hashim ◽  
Ahmad Sudin ◽  
Wei Wen Liu ◽  
Kai Loong Foo ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
High Performance ◽  
Surface Acoustic Waves ◽  
Equivalent Circuit Model ◽  
High Sensitivity ◽  
Theoretical Models ◽  
Acoustic Energy ◽  
Sensitive Detection ◽  
Label Free ◽  
Element Analysis

Surface acoustic waves based devices were initially developed for the telecommunication purpose such as signal filters and resonators. The acoustic energy is strongly confined on the surface of the surface acoustic waves (SAW) based devices and consequent their ultra-sensitivity to the surface perturbation. This has made SAW permits the highly sensitive detection of utterly diminutive charges on the surface. Hence, SAW based devices have been modified to be sensors. Food contamination has become critical issue and sensitive detection devices are needed urgently as small amount of harmful bacterial pathogens such as Escherichia coli (E.coli) O157:H7with the dose fewer than 100 organisms in food products or water is enough to cause serious gastrointestinal illness to human. Therefore, ultra-high sensitive, label free biosensors have been designed in this research for the low concentration E.coli detection. After the saturated development in telecommunication filed, SAW sensors were developed for gas detections and have been moving towards biological detections recently. Shear horizontal surface acoustic wave (SHSAW), one of the SAW based types is most suitable for the liquid based application as it has the advantage of acoustic energy is not being radiated into liquid. Therefore, SHSAW device has the potential to provide high-performance sensing platform in this research. There have been a lot of complicated theoretical models for the SAW devices development since 1960 as signal filters and resonators such as from delta function model, equivalent circuit model, to the current SAW models such as coupling-of-modes (COM) model, P-matrix model and finite element analysis (FEA) model. However, SHSAW device in this research is not meant for signal filter or resonators but used for surface sensing purpose, therefore the simplicity method of the modeling is presented in the paper for the E.coli detection sensor development.

scholarly journals Design and Analysis of a Novel Six-Component F/T Sensor based on CPM for Passive Compliant Assembly

2013 ◽  
Vol 13 (5) ◽  
pp. 253-264 ◽  
Author(s):  
Qiaokang Liang ◽  
Dan Zhang ◽  
Yaonan Wang ◽  
Yunjian Ge
Keyword(s):  
Structural Design ◽  
Parallel Mechanism ◽  
High Performance ◽  
High Sensitivity ◽  
Force Sensor ◽  
Element Analysis ◽  
Compliant Assembly ◽  
Compliant Parallel Mechanism ◽  
Passive Compliance ◽  
Component Force

Abstract This paper presents the design and analysis of a six-component Force/Torque (F/T) sensor whose design is based on the mechanism of the Compliant Parallel Mechanism (CPM). The force sensor is used to measure forces along the x-, y-, and z-axis (Fx, Fy and Fz) and moments about the x-, y-, and z-axis (Mx, My and Mz) simultaneously and to provide passive compliance during parts handling and assembly. Particularly, the structural design, the details of the measuring principle and the kinematics are presented. Afterwards, based on the Design of Experiments (DOE) approach provided by the software ANSYS®, a Finite Element Analysis (FEA) is performed. This analysis is performed with the objective of achieving both high sensitivity and isotropy of the sensor. The results of FEA show that the proposed sensor possesses high performance and robustness.

scholarly journals Influence of Citrus Flavor Addition in Brewing Process: Characterization of the Volatile and Non-Volatile Profile to Prevent Frauds and Adulterations

Separations ◽  
2021 ◽  
Vol 8 (2) ◽  
pp. 18
Author(s):  
Emanuela Trovato ◽  
Adriana Arigò ◽  
Federica Vento ◽  
Giuseppe Micalizzi ◽  
Paola Dugo ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Liquid Chromatography ◽  
Heterocyclic Compounds ◽  
High Performance ◽  
Solid Phase ◽  
High Sensitivity ◽  
Volatile Profile ◽  
Analytical Strategy ◽  
Process Characterization

In the last few years, the flavored beer market has increased significantly. In particular, consumers showed a growing interest in citrus-flavored beers. Citrus fruits contain, among other class of compounds, terpenes and terpenoids and oxygenated heterocyclic compounds. The absence of a specific legislation concerning beer flavored production and ingredients reported on the labels makes these beers subject to possible adulterations. Solid phase micro extraction (SPME) followed by gas chromatographic–mass spectrometry (GC-MS) and gas chromatographic-flame ionization detector (GC-FID) analysis of the volatile profile together with the characterization of the oxygen heterocyclic compounds through high performance liquid chromatography coupled to tandem mass spectrometry (HPLC-MS/MS) demonstrated to be a powerful analytical strategy for quality control. In this study, we combined the volatile and non-volatile profiles of “citrus flavored mainstream beers”, in order to evaluate the authenticity and determine markers to prevent food frauds. The changes in the aroma composition of the unflavored types after the addition of peel, or citrus essential oil were also evaluated. The linear retention index (LRI) system was used for both techniques; in particular, its application in liquid chromatography is still limited and represents a novelty. The coupling of the high sensitivity of the HPLC MS/MS method with the LRI system, it has made possible for the first time a reliable identification and an accurate quantification of furocoumarins in citrus-flavored beers.

Science and Technology of Piezoelectric/Diamond Hybrid Heterostructures for High Performance MEMS/NEMS Devices

2007 ◽  
Vol 1052 ◽  
Author(s):  
Orlando Auciello ◽  
Anirudha Sumant ◽  
Jon Hiller ◽  
Bernd Kabius ◽  
Sudarsan Srinivasa
Keyword(s):  
Tribological Properties ◽  
High Performance ◽  
Low Voltage ◽  
Diamond Films ◽  
High Sensitivity ◽  
Nanoelectromechanical Systems ◽  
Mechanical And Tribological Properties ◽  
Ultrananocrystalline Diamond ◽  
Pzt Films ◽  
Film Form

AbstractMost current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent mechanical and tribological properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

scholarly journals In-Situ Integration of 3D C-MEMS Microelectrodes with Bipolar Exfoliated Graphene for Label-Free Electrochemical Cancer Biomarkers Aptasensor

Micromachines ◽  
2022 ◽  
Vol 13 (1) ◽  
pp. 104
Author(s):  
Shahrzad Forouzanfar ◽  
Nezih Pala ◽  
Chunlei Wang
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
Point Of Care ◽  
High Sensitivity ◽  
Label Free ◽  
Lab On Chip ◽  
Electrochemical Label ◽  
Mems Technology ◽  
On Chip

The electrochemical label-free aptamer-based biosensors (also known as aptasensors) are highly suitable for point-of-care applications. The well-established C-MEMS (carbon microelectromechanical systems) platforms have distinguishing features which are highly suitable for biosensing applications such as low background noise, high capacitance, high stability when exposed to different physical/chemical treatments, biocompatibility, and good electrical conductivity. This study investigates the integration of bipolar exfoliated (BPE) reduced graphene oxide (rGO) with 3D C-MEMS microelectrodes for developing PDGF-BB (platelet-derived growth factor-BB) label-free aptasensors. A simple setup has been used for exfoliation, reduction, and deposition of rGO on the 3D C-MEMS microelectrodes based on the principle of bipolar electrochemistry of graphite in deionized water. The electrochemical bipolar exfoliation of rGO resolves the drawbacks of commonly applied methods for synthesis and deposition of rGO, such as requiring complicated and costly processes, excessive use of harsh chemicals, and complex subsequent deposition procedures. The PDGF-BB affinity aptamers were covalently immobilized by binding amino-tag terminated aptamers and rGO surfaces. The turn-off sensing strategy was implemented by measuring the areal capacitance from CV plots. The aptasensor showed a wide linear range of 1 pM–10 nM, high sensitivity of 3.09 mF cm−2 Logc−1 (unit of c, pM), and a low detection limit of 0.75 pM. This study demonstrated the successful and novel in-situ deposition of BPE-rGO on 3D C-MEMS microelectrodes. Considering the BPE technique’s simplicity and efficiency, along with the high potential of C-MEMS technology, this novel procedure is highly promising for developing high-performance graphene-based viable lab-on-chip and point-of-care cancer diagnosis technologies.

Characterization of a Microfabricated Differential Scanning Calorimeter

2015 ◽  
Author(s):  
Shuyu Wang ◽  
Shifeng Yu ◽  
Lei Zuo
Keyword(s):  
Differential Scanning Calorimeter ◽  
High Performance ◽  
Drug Stability ◽  
High Sensitivity ◽  
Sample Volume ◽  
Small Time ◽  
Low Noise ◽  
Noise Equivalent Temperature Difference ◽  
Parallel Measurement

Calorimeters are critical tools for structural based drug design and drug stability assessment. Current pharmaceutical industry is seeking for high throughput calorimeters to reduce the research time and expenditure. MEMS-based calorimeter is a potential solution for it, since they are miniaturized to detect the enthalpy change during macro molecular interaction with smaller amount of samples, shorter time and could easily enable parallel measurement. Consequently, we present a Differential Scanning Calorimeter (DSC) that requires 2μL sample volume. It has high thermal insulation (1210μW/K), small time constant (6.95s) and high sensitivity (7.5V/W). The low noise equivalent temperature difference (NETD) could lead to 130nW of power resolution. These characterization results indicate the device could be potentially applied for macromolecular interaction application and increase the throughput with high performance.

Torsional Micromirror Array Design for Optical Binary Switching and Amplitude Modulation Applications

1999 ◽  
Vol 605 ◽  
Author(s):  
E.S. Kolesar ◽  
P.B. Allen ◽  
N.C. Boydston ◽  
J.T. Howard ◽  
S.Y. Ko ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Optical Switches ◽  
Switching Speed ◽  
Element Analysis ◽  
Optical Surfaces ◽  
Current Voltage ◽  
Direct Current Voltage ◽  
Torsional Micromirror ◽  
Binary Switching ◽  
Mems Process

AbstractA torsional micromirror was designed and fabricated using a three-level, polysilicon, surface micromachined, microelectromechanical systems (MEMS) process. The torsional micromirrors have highly-reflective, gold-coated polysilicon optical surfaces. Electrostatically induced in-plane and outof-plane vertical deflections on the order of 2.75 νm were achieved. The modeling phase focused on the microdynamical behavior of the torsional micromirror. The IntelliCAD® finite element analysis program was used to generate a plot of the micromirror's deflection (d) versus applied direct current voltage (V). The data was least-squares fitted to the well-established V μ d3/2 relationship. A resonant frequency analysis predicted an approximate switching speed of 6 νsec. The relative reliability (number of operational cycles) of the torsional micromirror design was measured to exceed 2 million flexure events. The potential for using torsional micromirrors as binary optical switches and amplitude modulators is addressed.

Ultrastructural identification of three types of sensory setae on copepod antennae

1995 ◽  
Vol 53 ◽  
pp. 956-957
Author(s):  
T. M. Weatherby ◽  
P.H. Lenz
Keyword(s):  
Phase Locking ◽  
Membrane Surface ◽  
Reaction Times ◽  
High Sensitivity ◽  
Structural Features ◽  
Calanoid Copepods ◽  
Marine Food Webs ◽  
Dendritic Membrane ◽  
Ultrastructural Characterization

Crustaceans, as well as other arthropods, are covered with sensory setae and hairs, including mechanoand chemosensory sensillae with a ciliary origin. Calanoid copepods are small planktonic crustaceans forming a major link in marine food webs. In conjunction with behavioral and physiological studies of the antennae of calanoids, we undertook the ultrastructural characterization of sensory setae on the antennae of Pleuromamma xiphias.Distal mechanoreceptive setae exhibit exceptional behavioral and physiological performance characteristics: high sensitivity (<10 nm displacements), fast reaction times (<1 msec latency) and phase locking to high frequencies (1-2 kHz). Unusual structural features of the mechanoreceptors are likely to be related to their physiological sensitivity. These features include a large number (up to 3000) of microtubules in each sensory cell dendrite, arising from or anchored to electron dense rods associated with the ciliary basal body microtubule doublets. The microtubules are arranged in a regular array, with bridges between and within rows. These bundles of microtubules extend far into each mechanoreceptive seta and terminate in a staggered fashion along the dendritic membrane, contacting a large membrane surface area and providing a large potential site of mechanotransduction.

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