scholarly journals Full-Wave Analysis of Ultrahigh Electromechanical Coupling Surface Acoustic Wave Propagating Properties in a Relaxor Based Ferroelectric Single Crystal/Cubic Silicon Carbide Layered Structure

2017 ◽  
Vol 2017 ◽  
pp. 1-6
Author(s):  
Xiaojun Ji ◽  
Qiang Xiao ◽  
Jing Chen
Keyword(s):  
Silicon Carbide ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Electromechanical Coupling ◽  
Structural Parameters ◽  
Coupling Factor ◽  
Wave Analysis ◽  
Full Wave ◽  
Full Wave Analysis ◽  
Cubic Silicon Carbide

This paper describes a full-wave analysis of ultrahigh electromechanical coupling surface acoustic wave (SAW) of Y-cut X propagating Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (YX-PIMNT) single crystals on a cubic silicon carbide (3C-SiC) substrate. There are several eigenmodes including shear horizontal (SH) and Rayleigh SAWs. Based on the finite-element method (FEM), the phase velocity (vp) and coupling factor (K2) of SAWs varying with the top electrode thickness, thickness, and Euler angle (θ) of the YX-PIMNT substrate have been investigated. K2 of SH SAW can reach an extremely high value of 75.9%. The proper control of structural parameters can suppress unwanted responses caused by other modes without deteriorating the coupling factor. The large K2 value of SH SAW and suppression of unwanted responses have highly promising applications in developing ultrawideband and tunable SAW filters. Finally, the performance of 3C-SiC and 6H-SiC as substrates was investigated, and 3C-SiC was identified as a more attractive substrate candidate than 6H-SiC.

scholarly journals Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 5
Author(s):  
Zhenglin Chen ◽  
Qiaozhen Zhang ◽  
Sulei Fu ◽  
Xiaoyu Wang ◽  
Xiaojun Qiu ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Graphics Processing Unit ◽  
Comsol Multiphysics ◽  
Processing Unit ◽  
Wave Analysis ◽  
High Frequency Structure Simulator ◽  
Full Wave ◽  
Full Wave Analysis ◽  
Acoustic Wave Devices

In this paper, a hybrid full-wave analysis of surface acoustic wave (SAW) devices is proposed to achieve accurate and fast simulation. The partial differential equation (PDE) models of the physical system in question and graphics processing unit (GPU)-assisted hierarchical cascading technology (HCT) are used to calculate acoustic-electric characteristics of a SAW filter. The practical solid model of the radio frequency (RF) filter package is constructed in High Frequency Structure Simulator (HFSS) software and the parasitic electromagnetics of the entire package is considered in the design process. The PDE-based models of the two-dimensional finite element method (2D-FEM) are derived in detail and solved by the PDE module embedded in COMSOL Multiphysics. Due to the advantages of PDE-based 2D-FEM, it is universal, efficient and not restricted to handling arbitrary materials and crystal cuts, electrode shapes, and multi-layered substrate. Combining COMSOL Multiphysics with a user-friendly interface, a flexible way of modeling and mesh generation, it can greatly reduce the complicated process of modeling and physical properties definition. Based on a hybrid full-wave analysis, we present an example application of this approach on a TC-SAW ladder filter with 5° YX-cut LiNbO3 substrate. Numerical results and measurements were calculated for comparison, and the accuracy and efficiency of the proposed method were verified.

scholarly journals Enhanced Coupling Coefficient in Dual-Mode ZnO/SiC Surface Acoustic Wave Devices with Partially Etched Piezoelectric Layer

2021 ◽  
Vol 11 (14) ◽  
pp. 6383
Author(s):  
Huiping Xu ◽  
Sulei Fu ◽  
Rongxuan Su ◽  
Junyao Shen ◽  
Fei Zeng ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Electromechanical Coupling ◽  
Electromechanical Coupling Factor ◽  
Energy Conversion Efficiency ◽  
Coupling Factor ◽  
Piezoelectric Film ◽  
Dual Mode ◽  
Saw Devices ◽  
Rayleigh Mode

Surface acoustic wave (SAW) devices based on multi-layer structures have been widely used in filters and sensors. The electromechanical coupling factor (K2), which reflects energy-conversion efficiency, directly determines the bandwidth of the filter and the sensitivity of sensor. In this work, a new configuration of dual-mode (quasi-Rayleigh and quasi-Sezawa) SAW devices on a ZnO/SiC layered structure exhibiting significantly enhanced K2 was studied using the finite element method (FEM), which features in the partial etching of the piezoelectric film between the adjacent interdigitated electrodes (IDTs). The influences of piezoelectric film thickness, etching ratio, top electrodes, bottom electrodes, and the metallization ratio on the K2 were systematically investigated. The optimum K2 for the quasi-Rayleigh mode and quasi-Sezawa mode can exceed 12% and 8%, respectively, which increases by nearly 12 times and 2 times that of the conventional ZnO/SiC structure. Such significantly promoted K2 is of great benefit for better comprehensive performance of SAW devices. More specifically, a quasi-Rayleigh mode with relatively low acoustic velocity (Vp) can be applied into the miniaturization of SAW devices, while a quasi-Sezawa mode exhibiting a Vp value higher than 5000 m/s is suitable for fabricating SAW devices requiring high frequency and large bandwidth. This novel structure has proposed a viable route for fabricating SAW devices with excellent overall performance.

Full-wave analysis of shielded coplanar waveguide short-end

1990 ◽  
Vol 26 (19) ◽  
pp. 1615 ◽  
Author(s):  
G. Bartolucci ◽  
J. Piotrowski
Keyword(s):  
Coplanar Waveguide ◽  
Wave Analysis ◽  
Full Wave ◽  
Full Wave Analysis

Erratum: Full-wave analysis of shielded coplanar waveguide short-end

1990 ◽  
Vol 26 (22) ◽  
pp. 1922
Author(s):  
G. Bartolocci ◽  
J. Piotrowski
Keyword(s):  
Coplanar Waveguide ◽  
Wave Analysis ◽  
Full Wave ◽  
Full Wave Analysis
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