scholarly journals A Surface Acoustic Wave Ethanol Sensor with Zinc Oxide Nanorods

2012 ◽  
Vol 2012 ◽  
pp. 1-4 ◽  
Author(s):  
Timothy J. Giffney ◽  
Y. H. Ng ◽  
K. C. Aw
Keyword(s):  
Acoustic Wave ◽  
Frequency Shift ◽  
Surface Acoustic Wave ◽  
Zno Nanorods ◽  
High Sensitivity ◽  
Average Diameter ◽  
Zinc Nitrate ◽  
Zinc Oxide Nanorods ◽  
Center Frequency ◽  
Ethanol Sensor

Surface acoustic wave (SAW) sensors are a class of piezoelectric MEMS sensors which can achieve high sensitivity and excellent robustness. A surface acoustic wave ethanol sensor using ZnO nanorods has been developed and tested. Vertically oriented ZnO nanorods were produced on a ZnO/128∘ rotated Y-cut LiNbO3 layered SAW device using a solution growth method with zinc nitrate, hexamethylenetriamine, and polyethyleneimine. The nanorods have average diameter of 45 nm and height of 1 μm. The SAW device has a wavelength of 60 um and a center frequency of 66 MHz at room temperature. In testing at an operating temperature of 270 with an ethanol concentration of 2300 ppm, the sensor exhibited a 24 KHz frequency shift. This represents a significant improvement in comparison to an otherwise identical sensor using a ZnO thin film without nanorods, which had a frequency shift of 9 KHz.

A high sensitivity wireless mass-loading surface acoustic wave DNA biosensor

2014 ◽  
Vol 28 (07) ◽  
pp. 1450056 ◽  
Author(s):  
Hua-Lin Cai ◽  
Yi Yang ◽  
Yi-Han Zhang ◽  
Chang-Jian Zhou ◽  
Cang-Ran Guo ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Dna Sequences ◽  
Biological Treatment ◽  
High Performance ◽  
Processing System ◽  
High Sensitivity ◽  
Treatment Method ◽  
Saw Sensor ◽  
Target Dna

In this paper, a surface acoustic wave (SAW) biosensor with gold delay area on LiNbO 3 substrate detecting DNA sequences is proposed. By well-designed device parameters of the SAW sensor, it achieves a high performance for highly sensitive detection of target DNA. In addition, an effective biological treatment method for DNA immobilization and abundant experimental verification of the sensing effect have made it a reliable device in DNA detection. The loading mass of the probe and target DNA sequences is obtained from the frequency shifts, which are big enough in this work due to an effective biological treatment. The experimental results show that the biosensor has a high sensitivity of 1.2 pg/ml/Hz and high selectivity characteristic is also verified by the few responses of other substances. In combination with wireless transceiver, we develop a wireless receiving and processing system that can directly display the detection results.

Surface acoustic wave resonator from thick MOVPE-grown layers of GaN(0001) on sapphire

2002 ◽  
Vol 743 ◽  
Author(s):  
Sverre V. Pettersen ◽  
Thomas Tybell ◽  
Arne Rønnekleiv ◽  
Stig Rooth ◽  
Veit Schwegler ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Electromechanical Coupling ◽  
Film Surface ◽  
Center Frequency ◽  
Electromechanical Coupling Coefficient ◽  
Nitride Film ◽  
Wave Resonator ◽  
Lift Off ◽  
Definition Of

ABSTRACTWe report on fabrication and measurement of a surface acoustic wave resonator prepared on ∼10m thick GaN(0001) films. The films were grown by metal-organic vapor phase epitaxy on a c-plane sapphire substrate. The surface morphology of the films were examined with scanning electron and atomic force microscopy. A metallic bilayer of Al/Ti was subsequently evaporated on the nitride film surface. Definition of the resonator interdigital transducers, designed for a wavelength of λ=7.76m, was accomplished with standard UV lithography and lift-off. S-parameter measurements showed a resonator center frequency f0=495MHz at room temperature, corresponding to a surface acoustic wave velocity of 3844m/s. The insertion loss at center frequency was measured at 8.2dB, and the loaded Q-factor was estimated at 2200. Finally, measurements of the resonator center frequency for temperatures in the range 25–155°C showed a temperature coefficient of -18ppm/°C. The intrinsic GaN SAW velocity and electromechanical coupling coefficient were estimated at νSAW=383 1m/s and K2=1.8±0.4·10−3.

A passive wireless hydrogen surface acoustic wave sensor based on Pt-coated ZnO nanorods

2010 ◽  
Vol 21 (9) ◽  
pp. 095503 ◽  
Author(s):  
Ya-Shan Huang ◽  
Yung-Yu Chen ◽  
Tsung-Tsong Wu
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Nanorods ◽  
Acoustic Wave Sensor

scholarly journals Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 760 ◽  
Author(s):  
Izabela Constantinoiu ◽  
Cristian Viespe
Keyword(s):  
Acoustic Wave ◽  
Frequency Shift ◽  
Pulsed Laser Deposition ◽  
Surface Acoustic Wave ◽  
Limit Of Detection ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
High Porosity ◽  
Porous Films ◽  
Sem Images

The influence of sensitive porous films obtained by pulsed laser deposition (PLD) on the response of surface acoustic wave (SAW) sensors on hydrogen at room temperature (RT) was studied. Monolayer films of TiO2 and bilayer films of Pd/TiO2 were deposited on the quartz substrates of SAW sensors. By varying the oxygen and argon pressure in the PLD deposition chamber, different morphologies of the sensitive films were obtained, which were analyzed based on scanning electron microscopy (SEM) images. SAW sensors were realized with different porosity degrees, and these were tested at different hydrogen concentrations. It has been confirmed that the high porosity of the film and the bilayer structure leads to a higher frequency shift and allow the possibility to make tests at lower concentrations. Thus, the best sensor, Pd-1500/TiO2-600, with the deposition pressure of 600 mTorr for TiO2 and 1500 mTorr for Pd, had a frequency shift of 1.8 kHz at 2% hydrogen concentration, a sensitivity of 0.10 Hz/ppm and a limit of detection (LOD) of 1210 ppm. SAW sensors based on such porous films allow the detection of hydrogen but also of other gases at RT, and by PLD method such sensitive porous and nanostructured films can be easily developed.

A surface acoustic wave impedance-loaded high sensitivity sensor with wide dynamic range for ultraviolet light detection

2019 ◽  
Vol 296 ◽  
pp. 70-78 ◽  
Author(s):  
G. Ya. Karapetyan ◽  
V.E. Kaydashev ◽  
D.A. Zhilin ◽  
M.E. Kutepov ◽  
T.A. Minasyan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Ultraviolet Light ◽  
Dynamic Range ◽  
High Sensitivity ◽  
Wave Impedance ◽  
Wide Dynamic Range ◽  
Light Detection

Surface acoustic wave devices fabricated on epitaxial AlN film

2016 ◽  
Vol 09 (02) ◽  
pp. 1650034 ◽  
Author(s):  
Junning Gao ◽  
Zhibiao Hao ◽  
Lang Niu ◽  
Lai Wang ◽  
Changzheng Sun ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Epitaxial Film ◽  
Stop Band ◽  
Crystalline Quality ◽  
Center Frequency ◽  
Pass Band ◽  
Saw Devices ◽  
Aln Film

This paper reports surface acoustic wave (SAW) devices fabricated on AlN epitaxial film grown on sapphire, aiming to avoid the detrimental polarization axis inconsistency and refrained crystalline quality of the normally used polycrystalline AlN films. Devices with center frequency of 357 MHz and 714 MHz have been fabricated. The stop band rejection ratio of the as-obtained device reaches 24.5 dB and the pass band ripple is profoundly smaller compared to most of the reported AlN SAW devices with the similar configuration. Judging from the rather high edge dislocation level of the film used in this study, the properties of the SAW devices have great potential to be improved by further improving the crystalline quality of the film. It is then concluded that the AlN epitaxial film is favorable for high quality SAW devices to meet the high frequency and low power consumption challenges facing the signal processing components.

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