Micro-Optoelectromechanical Tilt Sensor
Keyword(s):
This paper presents a novel hybrid CMOS/MEMS tilt sensor with a5∘resolution over a300∘range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 mm×2.5 mm.
1993 ◽
Vol 115
(1)
◽
pp. 43-46
◽
2014 ◽
Vol 721
◽
pp. 424-427
Keyword(s):
2010 ◽
Vol 21
(5)
◽
pp. 054006
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1995 ◽
Vol 19
(4)
◽
pp. 397-416
Keyword(s):