F-15 Characterizing Hafnium Silicate Gate Dielectrics with a Total Reflection X-ray Fluorescence Spectrometer

2004 ◽  
Vol 19 (2) ◽  
pp. 202-202
Author(s):  
C. Sparks ◽  
P. Lysaght ◽  
T. Rhoad
Keyword(s):  
Gate Dielectrics ◽  
Total Reflection ◽  
Hafnium Silicate ◽  
X Ray ◽  
Fluorescence Spectrometer

Low-power total reflection X-ray fluorescence spectrometer using diffractometer guide rail

2014 ◽  
Vol 30 (1) ◽  
pp. 36-39
Author(s):  
Ying Liu ◽  
Susumu Imashuku ◽  
Jun Kawai
Keyword(s):  
Detection Limit ◽  
Low Power ◽  
Power Supply ◽  
Total Reflection ◽  
Minimum Detection Limit ◽  
Guide Rail ◽  
X Ray ◽  
Fluorescence Spectrometer

An X-ray diffractometer (XRD) was modified to a low-power total reflection X-ray fluorescence (TXRF) spectrometer. This was realized by reducing the XRD tube power (3 kW) down to 10 W by a Spellman power supply. The present spectrometer consisted of a waveguide slit, Si-PIN detector, a goniometer and two Z-axis stages that were set on a diffractometer guide rail. This unit was easy in assembly. The first measurements with this spectrometer were presented. The minimum detection limit for Cr was estimated to be a few nanograms or at the level of 1013 atoms cm−2.

Pigment particles analysis with a total reflection X-ray fluorescence spectrometer: study of influence of instrumental parameters

2016 ◽  
Vol 122 (12) ◽  
Author(s):  
Alessia Coccato ◽  
Bart Vekemans ◽  
Laszlo Vincze ◽  
Luc Moens ◽  
Peter Vandenabeele
Keyword(s):  
Total Reflection ◽  
X Ray ◽  
Fluorescence Spectrometer
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