Thermal Stability of Indium Doped Zinc Oxide Thin Films Prepared by Atmosphere Pressure Plasma Jet

2011 ◽  
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Zinc Oxide ◽  
Plasma Jet ◽  
Oxide Thin Films ◽  
Atmosphere Pressure ◽  
Pressure Plasma ◽  
Thermal Stability Of

Thermal Stability of Aluminum Doped Zinc Oxide Thin Films

2011 ◽  
Vol 685 ◽  
pp. 147-151 ◽  
Author(s):  
Jin Hua Huang ◽  
Rui Qin Tan ◽  
Jia Li ◽  
Yu Long Zhang ◽  
Ye Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Stability ◽  
Zinc Oxide ◽  
Solar Cells ◽  
Electrode Materials ◽  
Thin Film Solar Cells ◽  
Oxide Thin Films ◽  
Aluminum Doped Zinc Oxide ◽  
Thermal Stability Of

Transparent conductive oxides are key electrode materials for thin film solar cells. Aluminum doped zinc oxide has become one of the most promising transparent conductive oxide (TCO) materials because of its excellent optical and electrical properties. In this work, aluminum doped zinc oxide thin films were prepared using RF magnetron sputtering of a 4 at% ceramic target. The thermal stability of aluminum doped zinc oxide thin films was studied using various physical and structural characterization methods. It was observed that the electrical conductivity of aluminum doped zinc oxide thin films deteriorated rapidly and unevenly when it was heated up to 350 °C. When the aluminum doped zinc oxide thin films were exposed to UV ozone for a short time before heating up, its thermal stability and large area homogeneity were significantly improved. The present work provided a novel method for improving the durability of aluminum doped zinc oxides as transparent conductive electrodes in thin film solar cells.

Deposition of zinc oxide thin films by an atmospheric pressure plasma jet

2011 ◽  
Vol 519 (10) ◽  
pp. 3095-3099 ◽  
Author(s):  
Yao-wen Hsu ◽  
Hsin-Chieh Li ◽  
Yao-Jhen Yang ◽  
Cheng-che Hsu
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Oxide Thin Films ◽  
Pressure Plasma

Thermal Stability of Hydrogen-Doped Zinc-Oxide Thin-Films

2012 ◽  
Vol 15 (1) ◽  
pp. H14 ◽  
Author(s):  
Chi-Li Yeh ◽  
Shao-Ze Tseng ◽  
Wei-Ting Lin ◽  
Chien-Cheng Kuo ◽  
Sheng-Hui Chen
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Zinc Oxide ◽  
Oxide Thin Films ◽  
Thermal Stability Of

Thermal stability of indium tin oxide thin films co-sputtered with zinc oxide

2008 ◽  
Vol 516 (10) ◽  
pp. 3196-3203 ◽  
Author(s):  
Day-Shan Liu ◽  
Chia-Sheng Sheu ◽  
Ching-Ting Lee ◽  
Chun-Hsing Lin
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Zinc Oxide ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Thermal Stability Of
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