High and Low Dielectric Constant Materials
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A Value
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Silicon-based dielectrics (SiO2, Si3N4, SiOxNy etc.) have been widely used as the key dielectrics in the manufacturing of silicon integrated circuits (ICs) and virtually all other semiconductor devices. Dielectrics having a value of dielectric constant k × 8.854 F/cm more than that of silicon nitride (k > 7) are classified as high dielectric constant materials, while those with a value of k less than the dielectric constant of silicon dioxide (k < 3.9) are classified as the low dielectric constant materials. The minimum value of (k) is one for air. The highest value of k has been reported for relaxor ferroelectric (k = 24,700 at 1 kHz).
2020 ◽
Vol 32
(2)
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pp. 142-150
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2018 ◽
Vol 6
(9)
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pp. 2370-2378
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2004 ◽
Vol 151
(6)
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pp. F146
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