scholarly journals Quantitative Evaluation of Cobalt Disilicide/Si Interfacial Roughness

2017 ◽  
Vol 6 (5) ◽  
pp. P345-P349 ◽  
Author(s):  
Jing Yang ◽  
Jun Feng ◽  
Kecheng Li ◽  
Harish B. Bhandari ◽  
Zhefeng Li ◽  
...  
Keyword(s):  
Quantitative Evaluation ◽  
Cobalt Disilicide ◽  
Interfacial Roughness

TEM study of buried cobalt disilicide layers formed by ion implantation: Identification of cobalt monosilicide inclusions

1990 ◽  
Vol 48 (4) ◽  
pp. 576-577
Author(s):  
A. De Veirman ◽  
J. Van Landuyt ◽  
K.J. Reeson ◽  
R. Gwilliam ◽  
C. Jeynes ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Annealing Treatment ◽  
Silicon On Insulator ◽  
High Dose ◽  
Nitrogen Flow ◽  
Cobalt Disilicide ◽  
Transmission Electron ◽  
Beam Heating ◽  
Co Concentration ◽  
Silicon On Insulator Technology

In analogy to the formation of SIMOX (Separation by IMplanted OXygen) material which is presently the most promising silicon-on-insulator technology, high-dose ion implantation of cobalt in silicon is used to synthesise buried CoSi2 layers. So far, for high-dose ion implantation of Co in Si, only formation of CoSi2 is reported. In this paper it will be shown that CoSi inclusions occur when the stoichiometric Co concentration is exceeded at the peak of the Co distribution. 350 keV Co+ ions are implanted into (001) Si wafers to doses of 2, 4 and 7×l017 per cm2. During the implantation the wafer is kept at ≈ 550°C, using beam heating. The subsequent annealing treatment was performed in a conventional nitrogen flow furnace at 1000°C for 5 to 30 minutes (FA) or in a dual graphite strip annealer where isochronal 5s anneals at temperatures between 800°C and 1200°C (RTA) were performed. The implanted samples have been studied by means of Rutherford Backscattering Spectroscopy (RBS) and cross-section Transmission Electron Microscopy (XTEM).

Quantitative evaluation of -ray spectra from scintillation measurements

Physica ◽  
1952 ◽  
Vol 18 (2) ◽  
pp. 1147-1150
Author(s):  
D MAEDER ◽  
V WINTERSTEIGER
Keyword(s):  
Quantitative Evaluation

Qualitative-Quantitative Evaluation of Depressive Symptomatology

2017 ◽  
Author(s):  
Francesca Serra ◽  
Andrea Spoto ◽  
Marta Ghisi ◽  
Giulio Vidotto
Keyword(s):  
Quantitative Evaluation ◽  
Depressive Symptomatology

Quantitative evaluation of post-bone marrow transplant engraftment status using fluorescent-labeled variable number of tandem repeats

2000 ◽  
Vol 05 (2) ◽  
pp. 129-138
Author(s):  
Robert A. Luhm ◽  
Daniel B. Bellissimo ◽  
Arejas J. Uzgiris ◽  
William R. Drobyski ◽  
Martin J. Hessner
Keyword(s):  
Bone Marrow ◽  
Bone Marrow Transplant ◽  
Quantitative Evaluation ◽  
Tandem Repeats ◽  
Marrow Transplant ◽  
Variable Number

Quantitative Evaluation of Myocardial Stress/Rest 201TISPECT: Results of a ROI-Based Method in 108 Patients with CHD

1987 ◽  
Vol 26 (06) ◽  
pp. 234-240 ◽  
Author(s):  
H. Stirner ◽  
J. Dahl ◽  
R. Uebis ◽  
E. Kleinhans ◽  
M. Biedermann ◽  
...  
Keyword(s):  
Coronary Heart Disease ◽  
Heart Disease ◽  
Quantitative Evaluation ◽  
Myocardial Infarctions ◽  
Myocardial Spect ◽  
Luminal Diameter ◽  
Myocardial Stress ◽  
Threshold Criterion ◽  
Combined Evaluation ◽  
Severity Of The Disease

ROI-based polar maps (33 ROIs) were employed to evaluate quantitatively stress/rest myocardial 201TI SPECT in 108 patients with angiographically proven coronary heart disease (CHD) in comparison with 30 controls. Sensitivity in detecting a CHD with stenoses of > 50% of luminal diameter was determined versus normal regional values (± 2.5 SD) employing vitality (VI) and wash-out corrected redistribution (RD). The method was evaluated referring to the severity of the disease, to the number of ROIs displaying changes [(a) 1 ROI, (b) >2 ROIs], to validity of VI, RD or a combination thereof, and for specificity. Wash-out values were found to depend on degree of stress individually achieved and thus were not used as a threshold criterion. Sensitivity in supply areas with old myocardial infarctions was 95% (a) and 86% (b), resp. With no infarction, it was 96% (a) and 79% (b), resp. VI in stenosis > 75% was more sensitive than RD. However, combined evaluation of VI and RD yielded sensitivities from 91-100% (a) and 77-94% (b), resp. for different main supply areas. In stenosis < 50% with normal VI, RD was positive in 18-31 %. Specificity turned out to be 91 % (a) and 97% (b), resp. We conclude that the method presented is reliable to quantify numerically 201TI kinetics in myocardial SPECT, aimed at detecting and describing CHD.

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