Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP

2017 ◽  
Vol 6 (12) ◽  
pp. P853-P861 ◽  
Author(s):  
Chengwu Wang ◽  
Syuhei Kurokawa ◽  
Toshiro Doi ◽  
Julong Yuan ◽  
Binghai Lv ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Surface Morphology ◽  
Femtosecond Laser Ablation ◽  
Morphology Evolution ◽  
Surface Morphology Evolution

scholarly journals Femtosecond laser ablation of brass: A study of surface morphology and ablation rate

2012 ◽  
Vol 30 (3) ◽  
pp. 473-479 ◽  
Author(s):  
Mohamed E. Shaheen ◽  
Brian J. Fryer
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Surface Morphology ◽  
Fine Particles ◽  
Femtosecond Laser Ablation ◽  
Laser Pulses ◽  
Ambient Air ◽  
Ablation Rate ◽  
Femtosecond Laser Pulses ◽  
Nanosecond Laser

AbstractThe interaction of near infrared femtosecond laser pulses with a Cu based alloy (brass) in ambient air at atmospheric pressure and under different laser conditions was investigated. The effects of laser fluence and number of pulses on surface morphology and ablation rate were studied using scanning electron microscopy (SEM) and optical microscopy. Ablation rates were found to rapidly increase from 83 to 604 nm/pulse in the fluence range 1.14–12.21 J/cm2. At fluence >12.21 J/cm2, ablation rates increased slowly to a maximum (607 nm/pulse at 19.14 J/cm2), and then decreased at fluence higher than 20.47 J/cm2 to 564 nm/pulse at 24.89 J/cm2. Large amounts of ablated material in a form of agglomerated fine particles were observed around the ablation craters as the number of laser pulses and fluence increased. The study of surface morphology shows reduced thermal effects with femtosecond laser ablation in comparison to nanosecond laser ablation at low fluence.

Surface morphology after femtosecond laser ablation of insulators

2002 ◽  
Author(s):  
Juergen Reif ◽  
Florenta Costache ◽  
Matthias Henyk ◽  
Stanislav Pandelov
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Surface Morphology ◽  
Femtosecond Laser Ablation

Femtosecond laser ablation of Zn in air and ethanol: effect of fluence on the surface morphology, ablated area, ablation rate and hardness

2021 ◽  
Vol 127 (4) ◽  
Author(s):  
Shazia Bashir ◽  
Muhammad Shahid Rafique ◽  
Ali Asghar Ajami ◽  
Chandra Sekher Nathala ◽  
Wolfgang Husinsky ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Surface Morphology ◽  
Femtosecond Laser Ablation ◽  
Ablation Rate ◽  
Ethanol Effect

Effects of femtosecond laser ablation on the surface morphology and microstructure of a bulk TiCuPdZr glass alloy

Rare Metals ◽  
2009 ◽  
Vol 28 (3) ◽  
pp. 272-276
Author(s):  
Hongshui Wang ◽  
Chunyong Liang ◽  
Xueguang Chen ◽  
Lei Wang ◽  
Yang Yang ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Surface Morphology ◽  
Femtosecond Laser Ablation ◽  
Glass Alloy

scholarly journals Ridge waveguide lasers in Nd:GGG crystals produced by swift carbon ion irradiation and femtosecond laser ablation

2012 ◽  
Vol 20 (9) ◽  
pp. 9763 ◽  
Author(s):  
Yuechen Jia ◽  
Ningning Dong ◽  
Feng Chen ◽  
Javier R. Vázquez de Aldana ◽  
Sh. Akhmadaliev ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Ion Irradiation ◽  
Femtosecond Laser Ablation ◽  
Ridge Waveguide ◽  
Carbon Ion ◽  
Waveguide Lasers ◽  
Ridge Waveguide Lasers
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