Self-Limiting Growth and Thickness- and Temperature- Dependence of Optical Constants of ALD AlN Thin Films
2014 ◽
Vol 3
(4)
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pp. P101-P106
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2017 ◽
Vol 421
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pp. 866-869
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1991 ◽
Vol 16
(7)
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pp. 485-490
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2003 ◽
Vol 38
(9)
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pp. 773-778
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Keyword(s):
2020 ◽
Vol 583
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pp. 412066
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Keyword(s):
2007 ◽
Vol 19
(8-9)
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pp. 749-754
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