Influence of Copper Ion Concentration on the Kinetics of Formation of a Protective Layer on Copper in an Acidic CMP Solution Containing BTA and Glycine
2013 ◽
Vol 160
(10)
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pp. H653-H658
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1979 ◽
Vol 44
(3)
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pp. 912-917
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Keyword(s):
1977 ◽
Vol 14
(1-6)
◽
pp. 269-274
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Keyword(s):