Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition?

T. Faraz; F. Roozeboom; H. C. M. Knoops; W. M. M. Kessels

doi:10.1149/2.0051506jss

Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition?

ECS Journal of Solid State Science and Technology ◽

10.1149/2.0051506jss ◽

2015 ◽

Vol 4 (6) ◽

pp. N5023-N5032 ◽

Cited By ~ 57

Author(s):

T. Faraz ◽

F. Roozeboom ◽

H. C. M. Knoops ◽

W. M. M. Kessels

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Atomic Layer Etching

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Limited dose and angle-directed beam atomic layer etching and atomic layer deposition processes for localized film coatings on 3D sidewall structures

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5133953 ◽

2020 ◽

Vol 38 (2) ◽

pp. 022602

Author(s):

Thomas E. Seidel ◽

Michael I. Current

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Film Coatings ◽

Layer Deposition ◽

Deposition Processes ◽

Atomic Layer Etching

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Deposition-based patterning by area-selective deposition: Dielectric-on-dielectric and metal-on-metal using integrated Atomic Layer Deposition and thermally-driven Atomic Layer Etching (Conference Presentation)

Advances in Patterning Materials and Processes XXXVII ◽

10.1117/12.2553961 ◽

2020 ◽

Author(s):

Gregory N. Parsons

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Selective Deposition ◽

Layer Deposition ◽

Metal On Metal ◽

Thermally Driven ◽

Atomic Layer Etching

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Competition between Al2O3 atomic layer etching and AlF3 atomic layer deposition using sequential exposures of trimethylaluminum and hydrogen fluoride

The Journal of Chemical Physics ◽

10.1063/1.4973310 ◽

2017 ◽

Vol 146 (5) ◽

pp. 052819 ◽

Cited By ~ 20

Author(s):

Jaime W. DuMont ◽

Steven M. George

Keyword(s):

Atomic Layer Deposition ◽

Hydrogen Fluoride ◽

Atomic Layer ◽

Layer Deposition ◽

Atomic Layer Etching

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Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

Journal of Applied Physics ◽

10.1063/5.0013552 ◽

2020 ◽

Vol 128 (10) ◽

pp. 105302

Author(s):

Holger Saare ◽

Seung Keun Song ◽

Jung-Sik Kim ◽

Gregory N. Parsons

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Selective Deposition ◽

Layer Deposition ◽

Atomic Layer Etching

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(Invited) Atomic Layer Etching Using Thermal Reactions: Atomic Layer Deposition in Reverse

ECS Transactions ◽

10.1149/06907.0233ecst ◽

2015 ◽

Vol 69 (7) ◽

pp. 233-241

Author(s):

Y. Lee ◽

J. W. DuMont ◽

S. M. George

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Thermal Reactions ◽

Layer Deposition ◽

Atomic Layer Etching

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Atomic Layer Deposition and Atomic Layer Etching—An Overview of Selective Processes

TMS 2021 150th Annual Meeting & Exhibition Supplemental Proceedings - The Minerals, Metals & Materials Series ◽

10.1007/978-3-030-65261-6_20 ◽

2021 ◽

pp. 219-229

Author(s):

Samiha Hossain ◽

Oktay H. Gokce ◽

N. M. Ravindra

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Atomic Layer Etching

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Critical atomic-level processing technologies: Remote plasma-enhanced atomic layer deposition and atomic layer etching

Micro and Nanosystems ◽

10.2174/1876402910666181030092735 ◽

2018 ◽

Vol 10 ◽

Author(s):

Guangjie Yuan ◽

Haohao Li ◽

Bo Shan ◽

Johan Liu

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Atomic Level ◽

Remote Plasma ◽

Processing Technologies ◽

Layer Deposition ◽

Atomic Layer Etching

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(Invited) Atomic Layer Etching Using Thermal Reactions: Atomic Layer Deposition in Reverse

ECS Meeting Abstracts ◽

10.1149/ma2015-02/26/1007 ◽

2015 ◽

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Thermal Reactions ◽

Layer Deposition ◽

Atomic Layer Etching

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Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2

Chemistry of Materials ◽

10.1021/acs.chemmater.9b01143 ◽

2019 ◽

Vol 31 (13) ◽

pp. 4793-4804 ◽

Cited By ~ 20

Author(s):

Seung Keun Song ◽

Holger Saare ◽

Gregory N. Parsons

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Selective Deposition ◽

Layer Deposition ◽

Atomic Layer Etching

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Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/6.0000969 ◽

2021 ◽

Vol 39 (3) ◽

pp. 030402

Author(s):

Moustapha Jaffal ◽

Taguhi Yeghoyan ◽

Gauthier Lefèvre ◽

Rémy Gassilloud ◽

Nicolas Possémé ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Selective Deposition ◽

Layer Deposition ◽

Atomic Layer Etching

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