Abrasive Free Chemical Mechanical Planarization of Semi-Polar (11–22) GaN: Effect on Structural and Surface Properties and Subsequent Homoepitaxial Growth
2018 ◽
Vol 7
(4)
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pp. P152-P157
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Keyword(s):
1977 ◽
Vol 35
◽
pp. 388-389
Keyword(s):
1986 ◽
Vol 44
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pp. 392-393
1963 ◽
Vol 13
(6)
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pp. 265-272
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Keyword(s):
Keyword(s):