Complete Elemental Analysis of Low-ka-SiC:H Thin Films by Transmission FTIR Spectroscopy
2014 ◽
Vol 3
(3)
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pp. N52-N57
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2018 ◽
Vol 154
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pp. 52-58
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2016 ◽
Vol 1118
◽
pp. 184-193
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Keyword(s):
2018 ◽
Vol 427
◽
pp. 1041-1045
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2014 ◽
Vol 4
(1)
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pp. N3146-N3152
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2021 ◽
pp. 161-174
2016 ◽
Vol 18
(37)
◽
pp. 26144-26150
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Keyword(s):