Effective Gap Filling via Magnetic Field Simulation Assisted on Longthrow Sputtering PVD of Side Magnet Designs and Arrangements for 3DIC Application
2014 ◽
Vol 365
◽
pp. 64-69
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2002 ◽
Vol 42
(6)
◽
pp. 565-583
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Keyword(s):
Keyword(s):