The Critical Role of Dielectric Trench Etch in Enhancing Cu/low-k Dielectric Reliability for Advanced CMOS Technologies
2008 ◽
Vol 15
(2)
◽
pp. 50-59
◽
1998 ◽
Vol 5
(1)
◽
pp. 115A-115A
Keyword(s):
Keyword(s):