Sputtered Silicon Nitride Thin Films for Non-Volatile Memory Applications

2019 ◽  
Vol 39 (1) ◽  
pp. 371-377
Author(s):  
Matheus Adam ◽  
Artur Vicente P. Coelho ◽  
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2000 ◽  
Vol 40 (4-5) ◽  
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