High Growth Rate in Atomic Layer Deposition of TiO2 thin films by UV Irradiation

2011 ◽  
Vol 14 (4) ◽  
pp. H146 ◽  
Author(s):  
Seong Keun Kim ◽  
Susanne Hoffmann-Eifert ◽  
Rainer Waser
Keyword(s):  
Thin Films ◽  
Growth Rate ◽  
Atomic Layer Deposition ◽  
Uv Irradiation ◽  
High Growth ◽  
Atomic Layer ◽  
High Growth Rate ◽  
Tio2 Thin Films ◽  
Layer Deposition

High Growth Rate of Erbium Oxide Thin Films in Atomic Layer Deposition from (CpMe)3Er and Water Precursors

2005 ◽  
Vol 11 (10) ◽  
pp. 415-419 ◽  
Author(s):  
J. Päiväsaari ◽  
J. Niinistö ◽  
K. Arstila ◽  
K. Kukli ◽  
M. Putkonen ◽  
...  
Keyword(s):  
Thin Films ◽  
Growth Rate ◽  
Atomic Layer Deposition ◽  
High Growth ◽  
Atomic Layer ◽  
High Growth Rate ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

High Growth Rate SiO2 by Atomic Layer Deposition

2019 ◽  
Vol 13 (1) ◽  
pp. 453-457 ◽  
Author(s):  
Raija Matero ◽  
Suvi Haukka ◽  
Marko Tuominen
Keyword(s):  
Growth Rate ◽  
Atomic Layer Deposition ◽  
High Growth ◽  
Atomic Layer ◽  
High Growth Rate ◽  
Layer Deposition

Phase-gradient atomic layer deposition of TiO2 thin films by plasma-induced local crystallization

2021 ◽  
Author(s):  
Dohyun Go ◽  
Jaehyeong Lee ◽  
Jeong Woo Shin ◽  
Sungje Lee ◽  
Wangu Kang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Phase Gradient ◽  
Layer Deposition

High growth-rate atomic layer deposition process of cerium oxide thin film for solid oxide fuel cell

2019 ◽  
Vol 45 (3) ◽  
pp. 3811-3815 ◽  
Author(s):  
Jin-Geun Yu ◽  
Byung Chan Yang ◽  
Jeong Woo Shin ◽  
Sungje Lee ◽  
Seongkook Oh ◽  
...  
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
High Growth ◽  
Atomic Layer ◽  
Deposition Process ◽  
High Growth Rate ◽  
Solid Oxide ◽  
Oxide Thin Film ◽  
Oxide Fuel ◽  
Layer Deposition

scholarly journals Quantifying the Extent of Ligand Incorporation and the Effect on Properties of TiO2 Thin Films Grown by Atomic Layer Deposition Using an Alkoxide or an Alkylamide

2020 ◽  
Vol 32 (4) ◽  
pp. 1393-1407
Author(s):  
Maxime E. Dufond ◽  
Maïmouna W. Diouf ◽  
Clémence Badie ◽  
Carine Laffon ◽  
Philippe Parent ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition

Selection of post-growth treatment parameters for atomic layer deposition of structurally disordered TiO2 thin films

2008 ◽  
Vol 354 (2-9) ◽  
pp. 404-408 ◽  
Author(s):  
S. Dueñas ◽  
H. Castán ◽  
H. García ◽  
L. Bailón ◽  
K. Kukli ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition ◽  
Selection Of
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